Inficon Gmbh

Thomas Böhm

Daniel Wetzig

Werner Grosse Bley

Norbert Rolff

Randolf Paul Rolff

Hjalmar Bruhns

Gerhard Küster

Sandra Seitz

Jörn Liebich

Ralf Hirche

Ulrich Doebler

Randolf-Paul Rolff

Randolf Rolff

Werner Gro E Bley

Bley Werner Grosse

Disclosed is a mass-spectrometry leak detector including a multi-stage turbomolecular pump, a mass spectrometer connected to the suction side of the turbomolecular pump, a preliminary vacuum pump connected to the pressure side of the turbomolecular pump, and a booster pump stage. The suction side of the booster pump stage has a connection for a test object and the pressure side is connected to the pressure side of the turbomolecular pump and to the suction side of the preliminary vacuum pump by means of a gas line path. The stages of the turbomolecular pump and the booster pump stage are arranged on a common shaft and have a common drive and the gas line path is interrupted, by means of a separation, between the pressure side of the booster pump stage and the suction side of the pump stage of the turbomolecular pump connected to the mass spectrometer.

Mass-spectrometric leak detector with turbomolecular pump and booster pump on a common shaft

A leak detector operating according to the counterflow principle comprises a first high vacuum pump that operates in series with a primary pump. A second high vacuum pump is branched at a connecting point and an entry side thereof is connected to a mass spectrometer. A light test gas in the form of helium flows through the second high vacuum pump in a direction opposite to a transport direction. A conduit connecting an inlet to the entry side of the first high vacuum pump is devoid of restricted flow zones and valves in such a way that the pumping capacity of the leak detector is high for helium, thereby reducing the response time thereof. A valve for blocking the conduit leading via the first high vacuum pump is arranged between the exit side thereof and the entry side of the primary pump.

Leak detector comprising a vacuum apparatus

A leak detecting device includes a carrying device attached to a holder to be fastened to the body of an operator. From the carrying device, a flexible capillary line extends to a sniffing probe, which includes a gas inlet at its front end. The carrying device is connected with a basic device that includes a vacuum pump. In the carrying device, a test gas detector is arranged.

Leak detecting device

A leak detector includes an inlet, a high-vacuum pump, and a test gas detector, which is connected to the entry of the high-vacuum pump. A backing pump is connected to an outlet area of the high-vacuum pump, and a test gas line extends between the inlet of the leak detector and the backing pump, the test gas line being connected to the outlet area of the high-vacuum pump via a line section. In order to shorten the response time of the leak detector, the line and the backing pump are connected via separate connections to the outlet area of the high-vacuum pump.

Leak detector comprising an inlet

A leak test apparatus includes a housing having an interior sized for retaining a plurality of instrument components including a control unit. A sniffer gun is linked to the instrument components, the sniffer gun having an intake point, and a test leak includes a gas reservoir, a constriction, an opening suited for introducing the intake point of said sniffer gun, and a temperature sensor. The temperature sensor is linked, either by means of a wired connection or wirelessly to the control unit for signal transfer.

Leak indicator with test leak and test leak for integration into a leak detector

A leak detecting device of the counterflow type includes a high vacuum pump having an inlet connected to a mass spectrometer. In addition, a prevacuum pump is provided having an inlet connected to an outlet of the high vacuum pump and a leak detecting device input. A connecting conduit is further provided between the leak detecting device input and an intermediate inlet of the high vacuum pump. A first valve of variable conductance is arranged in the course of the connecting conduit. Valves with a large inner diameter are expensive while valves with a small inner diameter show considerable resistance even in a fully opened state. A second valve arranged parallel to the first adjustable valve is provided in the course of the connecting conduit; thereby allowing the first and second valves to have relatively small inner diameters arranged in the connecting conduit, wherein the combined conductance of both opened valves is considerably increased.

A sniffing leak detector includes a handpiece, supporting a sniffing tip, the detector further including a gas sensor. To promote longer life and obtaining more accurate results, the leak detector is equipped with an acceleration sensor for recording the movements of the handpiece.

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Kö'ln, Germany

Thomas Böhm