Vat Holding Ag

Thomas Blecha

Friedrich Geiser

Florian Ehrne

Anton Neumeir

Bernhard Duelli

Bernhard Litscher

Christoph Angst

Karlheinz Summer

Markus Nesensohn

Berhard Duelli

Rudolf Gfeller

Max Hossfeld

A vacuum valve having a valve body, a closure member, a valve rod which supports the closure member, a guide piece by which the valve rod is movably guided parallel to a longitudinal displacement direction, a longitudinal travel drive by which the valve rod is displaceable with respect to the guide piece parallel to the longitudinal displacement direction, a transverse travel drive, and a slide part which is movable by the transverse travel drive, is guided by a primary linear guide to be movable with respect to the valve body, and is guided by a secondary linear guide to be movable with respect to the guide piece. The primary and secondary linear guides each run at an angle of less than 45&#xb0; with respect to the longitudinal displacement direction, and the primary linear guides form an angle of more than 3&#xb0; and less than 45&#xb0; with the secondary linear guides.

Vacuum valve

A connecting apparatus for the connection of a valve rod () to a closure member () of a vacuum valve, with a connecting body () which is arranged between a first connecting part () and a second connecting part (). The connecting body () has a basic shape of a Steinmetz body which is formed by way of a intersection of two circular cylinders. The connecting body () is arranged in an intermediate space between arm projections () of the first connecting part () and in an intermediate space between arm projections () of the second connecting part (). Corresponding bearing faces () of the arm projections () bear against bearing faces () of the connecting body (). The two arm projections () of the respective connecting part () approach one another towards their free ends.

Connecting apparatus for the connection of a valve rod to a closure member of a vacuum valve

Closure element for a vacuum valve having a valve disk realized for the gas-tight closure of a process volume by means of interaction with a vacuum valve opening of the vacuum valve provided for the process volume, wherein the valve disk comprises a closure side and an oppositely situated rear side which is substantially parallel thereto and a first sealing face which is assigned to the closure side and corresponds to a second sealing face of the vacuum valve opening, in particular with regard to form and size, with cured-on sealing material, wherein the second sealing face runs around the vacuum valve opening, and a cross carrier with a receiving means for a drive component transversely with respect to an extension direction of the cross carrier, wherein the cross carrier is connected to the valve disk on the rear side of the valve disk at at least one connection point. The connection of the cross carrier to the valve disk comprises a friction stir welding connection at the at least one connection point.

Closure element for a vacuum seal having a friction stir welding connection

A door for closing a chamber opening in a chamber wall of a vacuum chamber in relation to a surrounding space, in which the vacuum chamber is located, includes a door housing arranged, a closing member arranged in the surrounding space, and a rod, to which the closing member is connected. A first movement of the rod, through which the closing member is displaced from an open position into an intermediate position, occurs as a displacement of the rod in a longitudinal axis direction, and a second movement of the rod subsequent thereto is a displacement at an angle to the longitudinal axis or a pivoting about a pivot axis which is perpendicular to the longitudinal axis from the intermediate position into a closed position. The rod is moveably mounted via the bearing elements, that are arranged in an inner space of the door housing that is sealed with respect to the surrounding space or is connected to the surrounding space via a passage, with a filter, extending through a housing wall of the door housing. The rod is guided out of the inner space in a sealed manner.

Door for closing a chamber opening in a chamber wall of a vacuum chamber

A vacuum slide gate valve with a drive unit that is formed in such a way that a closure plate, by displacement of at least one valve rod along a longitudinal axis, is displaceable from an open position into an intermediate position, and, by displacement of said valve rod along a transverse axis running at right angles to the longitudinal axis, is displaceable from the intermediate position into a closing position. The valve rod is rigidly connected to a sliding part, which is guided between a first position and a second position parallel to the longitudinal axis, and between the second position and a third position parallel to the transverse axis. A displacement member is mechanically coupled to the sliding part via an inclined connection to displace the sliding part from the first position into the second position and from the second position into the third position.

Vacuum slide gate valve

A valve having a closure member which is pressed against a valve seat in a closed position and closes an opening, and having a first valve drive for moving the closure member along a first movement path back and/or forth between a maximum open position and an intermediate position, and having a second valve drive for moving the closure member along a second movement path back and/or forth between the intermediate position and the closed position. The first movement path and the second movement path are arranged in an angled manner with respect to one another. The valve additionally includes at least one locking device with at least one locking body which interacts with at least one inclined surface and/or comprises at least one inclined surface, wherein the locking body is movable relative to the closure member along a third movement path between a locking position and a releasing position.

Valve, in particular a vacuum valve

A vacuum valve including a closure element () and a valve housing () with a valve opening () and an interior () in which the closure element () is arranged, the closure element resting against a valve seat () surrounding the valve opening () in the closed state of the vacuum valve. The valve housing () has a housing wall () made of sheet metal, the housing wall delimiting the interior () and being provided with a window opening () in order to form the valve opening (). The valve opening () is surrounded by a flange ring () that can be connected to a connection flange () of a vacuum unit () via screw connections, the vacuum unit having an interior and being attachable to the vacuum valve. The flange ring () has the valve seat () on which the closure element () is placed in the closed state of the vacuum valve.

A vacuum valve closes a flow path in a gas-tight manner using a linear movement and includes a closure member, a first sealing surface of the valve housing that encloses the opening, and a corresponding second sealing surface of the closure member. In the closed position, the second sealing surface is in sealing contact with the first sealing surface. In the region between the opening and the first sealing surface, the valve housing includes a first sloped surface that encloses the opening, and the closure member includes a corresponding, parallel second sloped surface. The sloped surfaces, which have a sloping angle between 3 and 15 degrees relative to the geometric adjustment axis, are located such that, in the closed position of the closure member, the second sloped surface is arranged in a parallel position opposite the first sloped surface at a distance of 0 and 0.6 mm.

Vacuum valve and closure member for closing a flow path in a gas-tight manner by means of a linear movement

A vacuum valve having a valve rod () which has a longitudinal axis () and which carries at least one closing member () for closing at least one valve orifice () and which can be displaced by a longitudinal drive (), in a longitudinal direction () lying parallel to the longitudinal axis () of the valve rod (), from an initial position, in which the vacuum valve is open, into an intermediate position and can be displaced by a transverse drive () from the intermediate position to at least one end position in which the vacuum valve is closed. A transmission piece () which is guided displaceably in the longitudinal direction () by at least one guide part () is secured to the valve rod (). At least one transverse drive part () of the transverse drive () engages on the guide part (), the guide part () being displaceable in the transverse direction () by the transverse drive () via the at least one transverse drive part (), and the guide part (), during its displacement in the transverse direction (), taking along the transmission piece ().

Valve (), in particular vacuum valve, having a passage opening () and a closure member (), it being possible for the closure member () to be moved by a valve drive () of the valve () in a closing direction () from an open position, in which it releases the passage opening (), into a closed position, in which it closes the passage opening (), and in the reverse direction. The closure member () is arranged in the closed position between two valve seats () which lie opposite one another and surround the passage opening (), and a first closure member part () of the closure member () bears against a first of the valve seats () in the closed position and a second closure member part () bears against the second valve seat () in the closed position. The closure member parts () are mounted such that they can be displaced relative to one another in the closing direction ().

Gate valve with linearly displaceable closing members

A mounting of a valve plate () on a valve rod () using a cross member () extending transversely with respect to the valve rod () is provided. The cross member () is connected at a central connecting point () to the valve rod () and is connected at least two lateral connecting points (), which are situated on both sides of the central connecting point (), to the valve plate (). The cross member () has a spacing (a) from the valve plate () in a central section () which comprises the central connecting point () and sections of the cross member () adjacent to the central connecting point () at both sides. By a twisting of the cross member (), the valve plate () can be pivoted relative to the valve rod () about a pivot axis () which is at right angles to the valve rod.

Mounting of a valve plate on a valve rod

A vacuum valve including a wall () having a valve opening () surrounded by a valve seat (), at least one valve plate (), which is disposed in a vacuum region of the vacuum valve and can be moved from an open position in a longitudinal direction () into an intermediate position, and from the intermediate position in a transverse direction () perpendicular to the longitudinal direction () into a closed position. At least one valve rod (), which carries the valve plate (), is led through the vacuum region of the vacuum valve and can be displaced relative to the wall () in the longitudinal direction () located parallel to the longitudinal axis () of the valve rod (), and also in the transverse direction (). Longitudinal and transverse drive devices () are disposed outside of the vacuum region of the vacuum valve, and the drive devices can displace the valve rod () in the longitudinal direction () and in the transverse direction () in order to adjust the valve plate (). A bearing unit () is provided, which is located outside of the vacuum region of the vacuum valve and rigidly connected to the wall () and by which a guide unit () that displaceably guides the valve rod () in the longitudinal direction () is guided displaceably in the transverse direction ().

A vacuum valve drive for linear displacement of a valve closure along an adjustment axis between an opened and closed position, and a vacuum valve comprising the vacuum valve drive, are provided. The vacuum valve drive comprises a drive housing containing a gas tight working space, a piston inside the working space, and at least one connecting rod which is led from the working space in a gas-tight manner to the valve closure. A static guide rod extends centrally and parallel to the adjustment axis inside the working space and is led through the piston. A precision linear bearing is between the piston and the guide rod. The piston is linearly guided by the guide rod with high precision and centered in the working space so that the valve closure is moved with high precision and pressed onto the valve seat.

Vacuum valve drive

A load-lock device for introducing substrates into a vacuum chamber comprises a load-lock chamber with at least one opening on the input side for introducing the substrates from an atmosphere area located in front of the input-side opening into an interior space located inside the load-lock chamber, and at least one opening on the output side for connecting the interior space of the load-lock chamber to the interior space of a vacuum chamber with the intermediary of a valve; at least one vacuum door which is associated with a respective opening on the input side and which comprises a closure-element which communicates with a drive device via at least one carrier rod and is adjustable by the drive device between a position in which the input-side opening is open and a position in which the input-side opening is closed and in which the closure element contacts a contact surface of the load-lock chamber, wherein, considered from the atmosphere area located in front of the input-side opening, the drive device is arranged behind a plane which extends through the contact surface of the load-lock chamber and lies vertical to the axis of the input-side opening.

Load-lock device for introducing substrates into a vacuum chamber

A vacuum valve comprises a valve body with a valve opening having an axis a closing member which is displaceable between an open position of the valve and a closed position of the valve in a closing direction extending at an angle to the axis of the valve opening, a sealing surface which surrounds the valve opening and which has at least two main portions which are arranged so as to be offset relative to one another in the direction of the axis of the valve opening, are connected with one another by connection portions, and whose imaginary generating lines have at least a portion or a tangent extending substantially vertical to the closing direction, a circumferentially closed seal which is arranged at the closing member and which has two main portions corresponding to the main portions of the sealing surface and connection portions which connect the two main portions, which seal can be placed against the sealing surface by of a displacement of the closing member in the closed position of the valve, wherein at least one of the main portions of the seal has a recess at least along a portion of its length, considered in cross section, on its side facing the sealing surface, and is arranged in a recess of the closing member whose side flanks support the seal laterally, and the corresponding portion of the sealing surface is arranged on a protuberance of the valve body or is provided with a protuberance, wherein the protuberance can be inserted in the recess of the seal when the valve is closed.

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Feldkirch, Austria

Thomas Blecha