Centre National De La Recherche Scientifique

Université De Franche Comte

Ecole Nationale Superieure De Mecanique Et Des Microtechniques

Ecole Nationale Superieure De Mecanique Et Des Microtechniques (Ensmm)

Centre National Detudes Spatiales

Université Paris-Saclay

Universite Paris Cité

Thomas Baron

Sylvain Ballandras

Gilles Martin

Philippe Brunet

Jean-Yves Rauch

Gwenn Ulliac

Blandine Edouard-Guichardaz

Yannick Gruson

Valérie Soumann

Etienne Herth

A temperature-controlled RF resonator. The resonator includes an insulating thermal enclosure within which are implemented: at least one resonant element configured to deliver an RF output signal when supplied with an RF input signal; at least one heating element configured to supply thermal energy within the thermal enclosure when the at least one heating element is powered by an LF electric power signal; and at least one temperature sensor configured to deliver an LF electric measurement signal as a function of the temperature inside the thermal enclosure. Such an RF resonator has at least one input/output port crossing the insulating thermal enclosure and propagating at least: one signal from among the RF signals; and another signal from among the LF electric signals.

Temperature-controlled radio-frequency resonator and corresponding radio-frequency oscillator

A bulk wave piezoelectric resonator operating at a predetermined frequency includes a substrate block, having a plane face, a first thickness and consisting of a first material, a resonant plate having a length, width and second thickness, and consisting of a second piezoelectric material, first and second metal electrodes at least partly covering the resonant plate on each side and partly facing each other. The resonant plate is fixed perpendicularly in the vicinity of the plane face of the substrate block so that the width of the resonant plate and the first thickness of the substrate block have the same direction, and the first material, the second material, the first thickness of the block of substrate, the length, the width, the second thickness of the resonant plate are configured for trapping bulk waves at the operating frequency of the resonator and for producing a plane-plane type bulk wave piezoelectric resonator.

Volume wave resonators on micromachined vertical structures

Growing community of inventors

Besancon, France

Thomas Baron