Atom Sciences, Inc.

Other

Wisconsin Alumni Research Foundation

Thomas B Lucatorto

James R Roberts

Tom J Whitaker

Thomas J McIlrath

Charles W Clark

Franco Cerrina

James J Snyder

Philip H Debenham

Inspection of objects such as X-ray lithography masks is carried out by passing X-rays or extreme ultraviolet light through an object which absorbs in a pattern to provide a patterned X-ray or ultraviolet image which is then directed to a converter. The converter converts the image incident upon it to an image formed by electrons emitted from the converter. The emitted electrons are magnified in an electron microscope and the magnified electron image is displayed by the electron microscope. The visible image may be further digitized and processed by a computer, including long-term storage or display on a computer monitor. X-ray lithography masks may be inspected by passing X-rays through masks of the same type that will be used for lithography so that the magnified image of the X-rays passed through the masks corresponds to the pattern of X-rays that will be incident on a photoresist, allowing accurate inspection of X-ray masks before use.

Method and apparatus for X-ray and extreme ultraviolet inspection of

Isotope analysis device comprising a racetrack-shaped ion storage ring, a resonant charge exchange device and a laser photoionization device. Isotope ions to be analyzed are continuously injected into the racetrack in a first orbit and pass through the resonant charge exchange device where they are neutralized and decelerated to produce decelerated isotope particles. Selected isotope particles are then re-ionized by the laser photoionization device, and the resulting selected isotope ions travel around the racetrack in a smaller orbit, while the undesired non-ionized particles exit the storage ring and are separately collected. After several succesively decreasing ion orbits, each isotope of the desired species reaches a detector where it is measured. The device is particularly useful for isotope analysis of strontium and of krypton.

Isotope analysis device and method

An ultrasensitive mass spectrometry method based on multiphoton sub-Doppler resonance ionization to measure abundance sensitivities. The method preferentially ionizes a selected isotope in a sample by using Doppler-free resonant multiphoton ionization to produce an enhanced ratio of selected isotopes. Background species are separately ionized and rejected. As necessary or desired, selected isotope ions are preferentially ionized by using a second Doppler-free resonant multiphoton ionization to provide an additional isotope enhancement. The ions produced are injected into a mass spectrometer. Isotopic spectrum analysis of the ions is performed by the spectrometer and the ions are then detected by a detector such as a particular photon multiplier capable of observing a single ion. In one embodiment, at least one of the steps of preferentially ionizing the selected isotope is accomplished by two counter propagating laser beams of slightly different frequencies. Further improved sensitivity is achieved by: (1) using a frequency offset of the laser frequency in an amount proportional to the laser intensity to overcome AC Stark shifts, and (2) withdrawing ions for mass separation from only the central portion of the laser interaction volume.

Ultrasensitive method for measuring isotope abundance ratios

An ultrasensitive mass spectrometry method based on multiphoton sub-Doppler resonance ionization is used to measure abundance sensitivities. The method preferentially ionizes a selected isotope in a sample by using Doppler-free resonant multiphoton ionization to produce an enhanced ratio of selected isotopes. As necessary or desired, selected isotope ions are preferentially ionized by using a second Doppler-free resonant multiphoton ionization to provide an additional isotope enhancement. The ions produced are injected into a mass spectrometer (24). Isotopic spectrum analysis of the ions is performed by the spectrometer (24) and the ions are then detected by a detector (26) such as a particular photon multiplier capable of observing a single ion. In one embodiment, at least one of the steps of preferentially ionizing the selected isotope is accomplished by two counter propagating laser beams of slightly different frequencies.

Optical devices utilizing multicapillary arrays such as beam splitters, calibrated beam attenuators, collimators, beam steering devices, beam modulators and phase shifters and lens.

Optical devices utilizing multicapillary arrays

Laser utilizing multicapillary array output window.

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Washington, DC, United States of America

Thomas B Lucatorto