Sub-one Technology, Inc.

Agm Container Controls, Inc.

Other

Duralar Technologies, LLC

Thomas B Casserly

William John Boardman

Andrew William Tudhope

Deepak Upadhyaya

Karthik Boinapally

Duc Doan

Raul Donate Mercado

Andrew Tudhope

Matthew MaMoody

Pankaj Jyoti Hazarika

Robert Martin Carlson

Steven F Sciamanna

William J Boardman

Frederick Contreras

Marion D McEuen

Salvatore Gennaro

Karthik Boinappaly

Jeffrey F Vogler

Rahul Ramamurti

A chemical vapor deposition system for coating one or more workpieces is described herein. The deposition system includes a plurality of processing chambers which may be operated independently to increase throughput of the deposition system. Each chamber includes a modular fixture that is configured to maintain the workpieces in a predetermined arrangement which allows for a hollow cathode effect to be maintained in an Interior space of the chamber. The deposition system achieves significantly faster, higher-quality deposition and more complete, conformal coverage.

Systems and methods for coating surfaces

Rapid plasma nitriding is achieved by harnessing the power and increased density of plasma discharges created by hollow cathodes. When opposing surfaces are maintained at the proper voltage, sub atmospheric pressure, and spacing, a phenomenon known as the hollow cathode effect creates additional hot oscillating electrons capable of multiple ionization events thereby increasing the number of ions and electrons per unit volume (plasma density). The present invention describes the harnessing of this phenomenon to rapidly plasma nitride metal surfaces and optionally rapidly deposit functional coatings in a continuous operation for duplex coatings.

Plasma nitriding with PECVD coatings using hollow cathode ion immersion technology

A method and apparatus for plasma enhanced chemical vapor deposition to an interior region of a hollow, tubular, high aspect ratio workpiece are disclosed. A plurality of anodes are disposed in axially spaced apart arrangement, to the interior of the workpiece. A process gas is introduced into the region. A respective individualized DC or pulsed DC bias is applied to each of the anodes. The bias excites the process gas into a plasma. The workpiece is biased in a hollow cathode arrangement. Pressure is controlled in the interior region to maintain the plasma. An elongated support tube arranges the anodes, and receives a process gas tube. A current splitter provides a respective selected proportion of a total current to each anode. One or more notch diffusers or chamber diffusers may diffuse the process gas or a plasma moderating gas. Plasma impedance and distribution may be controlled using various means.

Multiple anode plasma for CVD in a hollow article

Chemical vapor deposition for an interior of a hollow article with high aspect ratio

Enhanced corrosion resistance is achieved in a coating by using a germanium-containing precursor and hollow cathode techniques to form a first layer directly on the surface of a workpiece, prior to forming an outer layer, such as a layer of diamond-like carbon (DLC). The use of a germanium or germanium-carbide precursor reduces film stress and enables an increase in the thickness of the subsequently formed DLC. Germanium incorporation also reduces the porosity of the layer. In one embodiment, a cap layer containing germanium is added after the DLC in order to further reduce the susceptibility of the coating to chemical penetration from the top.

Corrosion-resistant internal coating method using a germanium-containing precursor and hollow cathode techniques

A method of coating at least one exterior surface of at least one workpiece is disclosed. The method may be used for coating inner and outer surfaces of pipes. A hollow workpiece is positioned within a chamber. A spacing between a multi-dimensional interior surface of the chamber and an exterior surface of the workpiece is fixed. Conditions are established to maintain a hollow cathode effect within the spacing and within the hollow workpiece. The conditions include biasing anodes at opposite ends of a hollow cathode effect region, and biasing the interior surface of the chamber and the workpiece as cathodes. The interior surface and the workpiece may be maintained at a common bias voltage or, in at least one embodiment, at differing voltages.

Method of coating inner and outer surfaces of pipes for thermal solar and other applications

A method of forming a diamond-like carbon coating by plasma enhanced chemical vapor deposition on an internal surface of a hollow component having an inner surface. A reduced atmospheric pressure is created within a pipe or other hollow component to be treated. A diamondoid precursor gas is introduced to the interior of the component. A bias voltage is established between a first electrode and one or more second electrodes. The first electrode is or is attached to the component. The second electrode is externally offset from an opening of the component, by a hollow insulator. A plasma region is established adjacent an inner surface of the component and extends through the hollow insulator. The precursor gas comprises at least one diamondoid. The pressure and bias voltage are selected such as to cause the deposition of diamond-like carbon on the inner surface.

Method for producing diamond-like carbon coatings using PECVD and diamondoid precursors on internal surfaces of a hollow component

A system () for coating surfaces of a workpiece () comprises a biasing system () for connection to said workpiece () and an anode () such as to negatively bias the workpiece relative to the anode and a vacuum source () for evacuating an interior of the workpiece (). A gas supply () is employed for introducing a gas containing a treatment material to said workpiece and a control system () controls the biasing system (), the vacuum source () and the gas supply () so as to establish a hollow cathode effect within the workpiece (). A pair of coupling heads () are supported on articulated arms () movable in one or more of three axes and include removable shields () to protect the heads () and an anode mount () for receiving an anode (). The articulated arms allow the system to accommodate a plurality of different shaped and different sized workpieces while the shields protect the coupling heads during a deposition process.

System and method for treating surfaces of components

An electrode assembly comprises a coil of electrode material surrounded by a shield having one or more outlets and a supply of shielding gas directed along an axis X-X of said coil before exiting from said shield.

Electrode systems and methods of using electrodes

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San Ramon, CA, United States of America

Thomas B Casserly