Carl Zeiss X-ray Microscopy, Inc.

Carl Zeiss Smt Gmbh

Xradia, Inc.

Novaray Medical, Inc.

Carl Zeiss Microscopy Gmbh

Thomas Anthony Case

Susan Candell

Wenbing Yun

David Lewis Adler

Srivatsan Seshadri

Josh Star-Lack

Brian Patrick Wilfley

Claus Flachenecker

Zhifeng Huang

Paul McGuinness

Allen Gu

Wayne Broderick

Naomi Kotwal

Heiko Feldmann

Johannes Ruoff

Alan Francis Lyon

Michael Feser

Bruce Borchers

Lorenz Lechner

Frederick William Duewer

Christoph Hilmar Graf Vom Hagen

Andrei V Tkachuk

Hauyee Chang

Thomas Matthew Gregorich

Juan Atkinson Mora

Gerhard Krampert

Zheren Wu

Lourens B Steger

A method images a region of interest of a sample using a tomographic X-ray microscope. The method includes registering a position of the sample. Registering includes: imaging a portion of the sample containing a feature using the microscope, identifying the feature by matching the feature to a pre-recorded feature, and determining a relative position of the feature in relation to the pre-recorded feature. The method also includes navigating a field of view of the microscope over the region of interest based on the registered position of the sample, and imaging the region of interest using the microscope.

Method for imaging a region of interest of a sample using a tomographic X-ray microscope, microscope, system and computer program

An x-ray source has a target assembly including a target, an electron source for generating electrons to impact the target, and a flight tube assembly separating the target assembly from the electron source and transporting a coolant to the target assembly. The flight tube assembly includes a flight tube interface ring, a target cartridge tube, and an electrical isolation ring between the flight tube interface ring and the target cartridge tube.

Method and system for liquid cooling isolated x-ray transmission target

A sample holder for holding a sample during an X-ray imaging process includes a sample placement surface on which the sample is placed for positioning the sample in a depth direction of the sample holder. The sample holder also includes a first alignment portion for aligning the sample in a width direction of the sample holder, and a second alignment portion for aligning the sample in a height direction of the sample holder.

Sample holder, system and method

The electron beam is typically dynamically steered after its generation on the path to the target. The steering is performed by one or more source coils. These coils produce the magnetic field outside the vacuum vessel allowing air/water/oil cooling to remove undesired heat. The magnetic field is then picked up inside the vacuum vessel with pole pieces and guided towards the region where the magnetic field is needed to steer the electron beam.

X-ray source with liquid cooled source coils

A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the X-ray source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane. A control device has a drive control unit, which is in signal connection with the shield stop displacement drive and with the object displacement drive for synchronizing a movement of the shield stop displacement drive and the object displacement drive. The result is an optimization of an X-ray illumination of the object to achieve a high-resolution object imaging.

Detection system for X-ray inspection of an object

A spectrum measurement and estimation method for tomographic reconstruction, beam hardening correction, dual-energy CT and system diagnosis, etc., comprises determining the spectra for combinations of source acceleration voltage, pre-filters and/or detectors and after measuring the transmission values of several pre-filters, calculating corrected spectra for the combinations of the source acceleration voltage, pre-filters and/or detectors.

Method and system for spectral characterization in computed tomography x-ray microscopy system

A method of operating a microscope comprises recording a first image Iof a sample, wherein the first image contains a first feature F; recording a second image Iof the sample, wherein the second image contains a second feature Farranged at a distance from the first feature; displacing the sample relative to the microscope by a displacement; recording a third image Iof the sample, wherein the third image contains the second feature; recording a fourth image Iof the sample, wherein the fourth image contains a third feature Farranged at a distance from the second feature; and determining a positionof the third feature relative to the first feature based on the first, second, third and fourth images.

Method of operating a microscope

A multi energy, such as dual-energy ('DE'), x-ray imaging system data acquisition and image reconstruction system and method enables optimizing the image contrast of a sample. Using the DE x-ray imaging system and its associated user interface applications, an operator performs a low energy ('LE') and high energy (&#x201c;HE&#x201d;) x-ray scan of the same volume of interest of the sample. The system creates a low-energy reconstructed tomographic volume data set from the set of low-energy projections and a high-energy tomographic volume data set from the set of high-energy projections. This enables the operator to control the image contrast of selected slices, and apply the information associated with optimizing the contrast of the selected slice to all slices in the low-energy and high-energy tomographic data sets. This creates a combined volume data set from the LE and HE volume data sets with optimized image contrast throughout.

Multi energy X-ray microscope data acquisition and image reconstruction system and method

A segmentation-and-spectrum-based metal artifact reduction (MAR) system and method is applied in polychromatic X-ray CT system that uses a priori knowledge of high-Z metals in samples which contribute the primary artifacts at a known x-ray energy spectrum. Using a basis materials decomposition, the method solves the problem of reducing or eliminating metal artifacts associated with beam hardening using only a single scan of the sample performed at selected x-ray energy.

Segmentation and spectrum based metal artifact reduction method and system

An x-ray imaging system data acquisition and image reconstruction system and method are disclosed which enable optimizing the image parameters based on multiple tomographic volumes of the sample that have been captured using an x-ray microscopy system. This enables the operator to control the image contrast, for example, of selected slices, and apply the information associated with optimizing the contrast of the selected slice to all slices in two or more tomographic volume data sets. This creates a combined volume with optimized image contrast throughout. Also, the system enables navigation within the volumes through functional annotation, improvements in volume registration and improvements in noise suppression both within the volumes and within slice histograms of the sample.

The present invention pertains to an apparatus for generating a charged particle beam comprising a magnetic element for controlling the profile of the beam in a predetermined plane. A cathode can be provided for emitting charged particles and an anode for accelerating the charged particles along an axis of travel. The present invention also pertains to a method for generating a particle beam that has a uniform profile in a predetermined plane comprising inducing emission of charged particles from an emitter, accelerating those particles along and toward an axis of beam travel, generating a magnetic field with a component aligned with the axis of beam travel but different in the predetermined plane than at the emitter, and modifying the beam profile.

Method and apparatus for generation of a uniform-profile particle beam

An x-ray source is described. During operation of the x-ray source, an electron source emits a beam of electrons. This beam of electrons is focused to a spot on a target by a magnetic focusing lens. In particular, the magnetic focusing lens includes an immersion lens in which a peak in a magnitude of an associated magnetic field occurs proximate to a plane of the target. Moreover, in response to receiving the beam of focused electrons, the target provides a transmission source of x-rays.

X-ray source with an immersion lens

An x-ray source is described. During operation of the x-ray source, an electron source emits a beam of electrons. This beam of electrons is focused to a spot on a target by a magnetic focusing lens. In response to receiving the beam of focused electrons, the target provides a transmission source of x-rays. Moreover, a repositioning mechanism selectively repositions the beam of focused electrons to different locations on a surface of the target based on a feedback parameter associated with operation of the x-ray source. This feedback parameter may be based on: an intensity of the x-rays output by the x-ray source; a position of the x-rays output by the x-ray source; an elapsed time during operation of the x-ray source; a cross-sectional shape of the x-rays output by the x-ray source; and/or a spot size of the x-rays output by the x-ray source.

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Walnut Creek, CA, United States of America

Thomas Anthony Case