Veeco Instruments Inc.

Thomas Andrew Schneider

Ming Mao

Jinsong Wang

Randhir S Bubber

Jacques C S Kools

Jacques Constant Stefan Kools

Michael Gutkin

An amorphous soft magnetic thin film material for forming shielding and keeper applications in MRAM devices. The amorphous soft magnetic material may be deposited using Physical Vapor Deposition (PVD) in the presence of a magnetic field, in order to form shielding layers and keepers in a multi-layer metallization process. The soft magnetic material may be an amorphous metallic alloy, such as CoZrX, where X may be Ta, Nb, Pd and/or Rh.

Amorphous soft magnetic shielding and keeper for MRAM devices

A method and apparatus for fabricating a conformal thin film on a substrate are disclosed. The method includes introducing a gas from a gas inlet into an expansion volume associated with an atomic layer deposition (ALD) system. The gas is flowed through a diffuser plate adjacent to the expansion volume and a reaction chamber. The diffuser plate includes a protrusion located opposite the gas inlet and the protrusion reduces turbulence in the expansion volume.

Method and apparatus for fabricating a conformal thin film on a substrate

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Livermore, CA, United States of America

Thomas Andrew Schneider