Other

Applied Materials, Inc.

Thomas Allen Graves

Kenneth S Collins

Jennifer Y Sun

Ren-Guan Duan

Senh Thach

Li Xu

Jie Yuan

Xiaoming He

A trigger activated arm may use a piston moving within a cylinder to dampen gun bolt speed. In some embodiments, gun bolt motion increases pressure within the cylinder bore to dampen rearward gun bolt speed. The pressure may be high enough to unseat the cylinder creating a vent that cylinder fluid exits. In other embodiments, gun bolt motion decreases pressure within the cylinder bore to dampen forward gun bolt speed.

3-cycle 2-stroke damper

A trigger activated arm may use engagement of an integrated gun bolt cam with an integrated trigger cam to reposition the trigger as the gun bolt reciprocates. The gun bolt trigger engagement may be used to reset the trigger.

Flex-fire G2 technology

A handheld finger activated semi-automatic arm may include a barrel, a trigger, a moveable gun bolt and a trigger reset mechanism. The trigger reset mechanism may use rigid mechanical contact between the trigger and the gun bolt during an earliest portion of the operating cycle. The trigger may be blocked from depression by the gun bolt up to 99% of the operating cycle.

Flex-fire technology

Specialty ceramic materials which resist corrosion/erosion under semiconductor processing conditions which employ a corrosive/erosive plasma. The corrosive plasma may be a halogen-containing plasma. The specialty ceramic materials have been modified to provide a controlled electrical resistivity which suppresses plasma arcing potential.

Method of reducing plasma arcing on surfaces of semiconductor processing apparatus components in a plasma processing chamber

A method of creating a plasma-resistant thermal oxide coating on a surface of an article, where the article is comprised of a metal or metal alloy which is typically selected from the group consisting of yttrium, neodymium, samarium, terbium, dysprosium, erbium, ytterbium, scandium, hafnium, niobium or combinations thereof. The oxide coating is formed using a time-temperature profile which includes an initial rapid heating rage, followed by a gradual decrease in heating rate, to produce an oxide coating structure which is columnar in nature. The grain size of the crystals which make up the oxide coating is larger at the surface of the oxide coating than at the interface between the oxide coating and the metal or metal alloy substrate, and the oxide coating is in compression at the interface between the oxide coating and the metal or metal alloy substrate.

Method of producing a plasma-resistant thermal oxide coating

Plasma-resistant ceramics with controlled electrical resistivity

An article which is resistant to corrosion or erosion by chemically active plasmas and a method of making the article are described. The article is comprised of a metal or metal alloy substrate having on its surface a coating which is an oxide of the metal or metal alloy. The structure of the oxide coating is columnar in nature. The grain size of the crystals which make up the oxide is larger at the surface of the oxide coating than at the interface between the oxide coating and the metal or metal alloy substrate, and wherein the oxide coating is in compression at the interface between the oxide coating and the metal or metal alloy substrate. Typically the metal is selected from the group consisting of yttrium, neodymium, samarium, terbium, dysprosium, erbium, ytterbium, scandium, hafnium, niobium or combinations thereof.

Growing community of inventors

Buda, TX, United States of America

Thomas Allen Graves