Government of the United States of America, As Represented by the Secretary of Commerce

Other

Thomas A Germer

George W Mulholland

Eric B Steel

Jung Hyeun Kim

Clara C Asmail

Sheryl H Ehrman

Embodiments of the present invention relate to an ellipsometer that includes a combination of a plurality of reflective devices to measure a Mueller matrix reflectance of a material in the VUV and EUV region. Ellipsometer in accordance with embodiments of the present invention relate to an ellipsometer that includes a multi-mirror polarization state generator combined with a multi-mirror polarization state analyzer and a detector to realize a Mueller matrix ellipsometer. Embodiments of the present invention utilize two rotating assemblies with each assembly including multiple mirrors that combine to act as amplitude and phase retarders.

Mueller matrix ellipsometer

A spray pyrolysis method for producing pure metal and/or metal oxide particles uses a mixture of a carrier gas and a solution of a metal salt precursor, water and a co-solvent reducing agent. The metal salt precursors preferably comprise metals from the group consisting of Fe, Co, Ni, Cu, Zn, Pd, Ag and Au, whereas the salt anions preferably comprise nitrates, acetates, oxalates and chlorides. The co-solvents are those that act as a reducing agent, are vaporizable, are inert with respect to the carrier gas, and are hydrophilic, such as alcohols, in particular, low-carbon numbered alcohols such as methanol or ethanol.

Method of producing metal particles by spray pyrolysis using a co-solvent and apparatus therefor

A microroughness-blind optical scanner focuses p-polarized light onto the rface of a sample. Scattered light is collected through independently rotatable polarizers by one or more collection systems uniformly distributed over a hemispherical shell centered over the sample. The polarizer associated with each collection system is rotated to cancel the corresponding Jones vector thereby preventing detection of microroughness-scattered light, yielding higher sensitivity to particulate defects. The sample is supported on a positioning system permitting the beam to be scanned over the sample surface of interest.

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Gaithersburg, MD, United States of America

Thomas A Germer