Gatan, Inc.

Hunt, John Andrew

Hosman, Thijs C.

Coyle, Steven Thomas

Hassel-shearer, Michael Patrick

Thijs C Hosman

Steven Thomas Coyle

John Andrew Hunt

Michael Patrick Hassel-Shearer

Michael Patrick Hassel-shearer

Disclosed are embodiments of an ion beam sample preparation and coating apparatus and methods. A sample may be prepared in one or more ion beams and then a coating may be sputtered onto the prepared sample within the same apparatus. A vacuum transfer device may be used with the apparatus in order to transfer a sample into and out of the apparatus while in a controlled environment. Various methods to improve preparation and coating uniformity are disclosed including: rotating the sample retention stage; modulating the sample retention stage; variable tilt ion beam irradiating means, more than one ion beam irradiating means, coating thickness monitoring, selective shielding of the sample, and modulating the coating donor holder.

Methods and apparatus for determining, using, and indicating ion beam working properties

Ion beam sample preparation and coating apparatus and methods

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San Francisco, CA, United States of America

Thijs C Hosman