Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Safran

Politecnico Di Milano

Thierry Verdot

Patrice Rey

Loic Joet

Philippe Robert

Laurent Duraffourg

Giacomo Langfelder

Loïc Joet

Emmanuel Ollier

Bruno Fain

Marc Sansa Perna

Caroline Coutier

Mikael Colin

Mikaël Colin

Philippe Serge Claude Onfroy

Théo Miani

Valentina Zega

Andrea Buffoli

A resonant sensor including a support, a proof body suspended from the support and having a resonant frequency ωa, an element that measures a force including at least one resonator of resonant frequency ω, the force being applied by the proof body, and a mechanical decoupling structure interposed between the proof body and the resonator. The decoupling structure includes a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ωis such that ωa<ω<ω, the decoupling structure forming a mechanical low-pass filter between the proof body and the resonator.

Resonant microelectromechanical sensor with improved operation

The invention relates to a device for detecting a gaseous species by photoacoustic effect. The device comprises a substrate, inside which a cavity is formed. A light source is disposed on the substrate, in such a way that a part of the substrate extends between the light source and the cavity. The device is arranged in such a way that the light, emitted by the light source, is propagated through the substrate, before reaching the cavity.

Compact photoacoustic detection device

A mechanical link for microelectromechanical and/or nanoelectromechanical structure, includes a mobile component, a fixed component extending on a plane, and apparatus for detecting displacement of the mobile component relative to the fixed component. The mechanical link includes: a first link to the fixed component and mobile component, allowing rotation of the mobile component relative to the fixed component about an axis of rotation; a second link connecting the mobile component to the detection apparatus at a distance and perpendicular to the axis of rotation; a third link to the fixed component and detection apparatus, guiding the detection apparatus in a direction of translation in the plane; wherein the combination of the second link and third link can transform rotational movement of the mobile component into translational movement of the detection apparatus in the direction of translation. The detection apparatus includes a piezoresistive/piezoelectric strain gauge, resonance beam, capacitance, or combination thereof.

Mechanical link for MEMS and NEMS mechanical structure, and MEMS and NEMS structure comprising such a mechanical link

A hinge for a micromechanical and/or nanomechanical structure includes: a support, and a movable part in an out-of-plane direction. The hinge allows for the out-of-plane displacement of the movable part. The hinge further includes two torsion beams extending along the axis of rotation of the hinge, two bending elements mechanically connecting the movable part and the support and having at least one pair of a first and of a second beam parallel with each other and extending in a plane perpendicular to the axis of rotation, the first beam being connected to the support and the second beam being connected to the movable part, the first and second beams being connected to one another by a first connecting element at a longitudinal end, the two beams extending in the same direction from the first connecting element.

Hinge offering a reduced sensitivity to internal stresses

A hinge between a support and a movable part in an out-of-plane direction of a microelectromechanical structure includes two torsion beams, and two bending elements connecting the movable part and the support and each comprising two beams extending perpendicularly to the axis of rotation. Each beam is connected to the support by a first end and to the movable part by a second end, the first ends and the second ends of the beams being disposed with respect to one another in such a way that the orientation of the first end towards the second end of one beam is opposite to the orientation of the first end towards the second end of the other beam.

Out-of-plane hinge for a micromechanical and/or nanomechanical structure with a reduced sensitivity to internal stresses

A system is disclosed for suspension of a mobile mass, such as an inertial angular sensor, including a connection device including first and second connection elements connected to each other through a connection block and deformable in bending in a mobility plane so as to enable displacements relative to the connection block, of the mobile mass connected to the first connection element, and of another element of the system connected to the second connection element such as a support or another mobile mass respectively, along two distinct directions respectively. At least one of the connection elements is formed from two springs, connecting the connection block to the mobile mass or the other element of the system respectively. The connection element thus has improved linearity properties.

Mobile mass suspension system comprising means of connecting the mobile mass with optimised linearity

A MEMS and/or NEMS pressure sensor including, in a substrate: a stationary portion and a portion movable relative to the stationary portion, the movable portion including a sensitive element configured to move in the plane of the sensor under effect of a pressure variation; a stress gauge detecting movement of the sensitive element in the plane of the sensor due to the pressure variation; electrodes actuating the sensitive element, the actuating electrodes being borne partially by the stationary portion and partially by the movable portion, the actuating electrodes being commanded to automatically control positionwise the movement of the sensitive element; a mechanism commanding the actuating electrodes, which is configured, on the basis of signals emitted by the gauge, to bias the actuating electrodes to automatically control positionwise the movement of the sensitive element.

Growing community of inventors

Grenoble, France

Thierry Verdot