Stmicroelectronics S.a.

Thierry Schwartzmann

Yvon Gris

Damien Lenoble

Laurence Boissonnet

Michel Marty

Alain Chantre

Denis Cottin

Herv&eacute; Jaouen

Bertrand Martinet

Sophie Taupin

Mathieu Marin

Jean-Charles Vildeuil

An integrated circuit includes a bipolar transistor comprising a substrate and a collector formed in the substrate. The collector includes a highly doped lateral zone, a very lightly doped central zone and a lightly doped intermediate zone located between the central zone and the lateral zoneof the collector. The substrate includes a lightly doped lateral zone and a highly doped central zone. The dopant species in the zone of the substrate are electrically inactive.

Integrated circuit comprising a gradually doped bipolar transistor and corresponding fabrication process

An integrated circuit includes a substrate and a resistor. The resistor is formed from at least two access wells of a first conductivity type and a deep buried layer electrically connecting the wells. The deep buried layer is at least partly covered by a region of opposite conductivity.

Integrated circuit comprising a substrate and a resistor

Integrated circuit comprising a gradually doped bipolar transistor

A method of manufacturing a bipolar transistor in a P-type substrate, including the steps of forming in the substrate a first N-type area; forming by epitaxy a first silicon layer; forming in this first layer, and substantially above the first area a second heavily-doped P-type area separate from the second area; forming at the periphery of this second area a third N-type area; forming by epitaxy a second silicon layer; forming a deep trench crossing the first and second silicon layers, penetrating into the substrate and laterally separating the second area from the third area; and performing an anneal such that the dopant of the third area is in continuity with that of the first area.

Bipolar transistor manufacturing method

The forming of a contact with a deep region of a first conductivity type formed in a silicon substrate. The contact includes a doped silicon well region of the first conductivity type and an intermediary region connected between the deep layer and the well. This intermediary connection region is located under a trench. The manufacturing method enables forming of vertical devices, in particular fast bipolar transistors.

Contact structure on a deep region formed in a semiconductor substrate

A MOS transistor with a drain extension includes an isolation block on the upper surface of a semiconductor substrate. The isolation block has a first sidewall next to the gate of the transistor, and a second sidewall that is substantially parallel to the first sidewall. The isolation block further includes a drain extension zone in the substrate under the isolation block, and a drain region in contact with the drain extension zone. The drain region is in the substrate but is not covered by the isolation block.

Method of fabricating a MOS transistor with a drain extension and corresponding transistor

A method of forming separate buried layers close to one another in a semiconductor component. This method includes the steps of forming, by implantation, doped areas in a semiconductor substrate; performing an anneal just sufficient to eliminate crystal defects resulting from the implantation; depositing an epitaxial layer; digging trenches delimiting each implanted region; and annealing the buried layers, the lateral diffusion of which is blocked by said trenches, said trenches being deeper than the downward extension of the diffusions resulting from said implantations.

Buried layer manufacturing method

The collector of a vertical bipolar transistor is selectively doped by a first implantation of dopants before the epitaxy of the base, and is selectivly doped by a second implantation of dopants through the epitaxial base. Two implanted zones with different widths are obtained. The base of the vertical bipolar transistor is thinned and the collector resistance is optimized.

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Le Versoud, France

Thierry Schwartzmann