Pfeiffer Vacuum Gmbh

Thibaut Bourrilhon

Eric Mandallaz

Nicolas Varennes

Rainer Mathes

Christophe Santi

A pump unit includes a rough-vacuum pump and a Roots vacuum pump connected in series and upstream of the rough-vacuum pump in the direction of flow of the pumped gases. The Roots vacuum pump has three pumping stages in which the rotors are designed to be driven simultaneously in rotation by a motor of the Roots vacuum pump. A ratio of the flow rate generated by the first pumping stage of the rough-vacuum pump in the direction of flow of the pumped gases over the flow rate generated by the last pumping stage of the rough-vacuum pump is less than or equal to four.

Pump unit

The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange () intended to be coupled to an outlet orifice of a chamber and an outlet coupling () comprising at least two cylindrical outlet through-housings () and forming an at least partial pump casing for the case () of a respective turbomolecular vacuum pump (), said turbomolecular vacuum pumps () being intended to be received in a respective cylindrical outlet housing (). The invention also relates to a pumping device, characterized in that it comprises an adapter for vacuum pumps () as described hereinabove and at least two turbomolecular vacuum pumps () housed at least partially in a respective cylindrical outlet housing ().

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Trevignin, France

Thibaut Bourrilhon