Lam Research Corporation

Theresa Moriguchi

Gean Hsu

A method for generating plasma processing system component analysis software is provided. The method includes defining component specifications for a plurality of components. Each of the plurality of components implements at least one of a user-interface function, a logic operation function, an input function, and an output function for analyzing a plasma processing system component. Defining includes selecting the plurality of components from a component panel of a visual integrated design editor architecture (VIDEA), thereby causing the plurality of components to be disposed in a layout format in the VIDEA. Defining also includes specifying properties of each of the plurality of components by performing at least one of selecting from predefined properties and defining parameters for the properties. The method also includes saving the plurality of components after the defining in a mark-up language configured to be executable by a browser without requiring prior compiling.

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Newark, CA, United States of America

Theresa Moriguchi