Asml Netherlands B.v.

Oce-van Der Grinten N.v.

Theodorus Knoops

Sjoerd Nicolaas Lambertus Donders

Henrikus Herman Marie Cox

Petrus Marinus Christianus Maria Van Den Biggelaar

Yin Tim Tso

In a lithographic projection apparatus and a device manufacturing method, a movable part is controlled to produce a motion, an absolute value of at least one of a fourth and a higher derivative to time of the position of the motion being limited to less than a maximal value. Specifying at least one of a fourth and a higher derivative to time of the position may help to improve settling behavior to obtain more accurate positioning. Further, a movable part may be controlled to produce an acceleration of the movable part having a high at least one of a third and a higher derivative to time of the position of the motion at a start portion of the acceleration and a corresponding low at least one of a third and a higher derivative to time of the position of the motion at an end portion of the acceleration, the absolute value of the high at least one of the third and the higher derivative to time of the position of the motion being larger than the absolute value of the corresponding low at least one of the third and the higher derivative to time of the position of the motion.

Lithographic apparatus and device manufacturing method

Device for the assorted collection of sheets, comprising a transport track and bins situated along this track. The bins are provided with guide organs and each bin can be moved so that its guide organ protrudes into the track so as to guide a sheet into a bin. In the transport track the sheets are transported by means of belts running around a vacuum holddown device so as to hold the sheets onto the belts. The device may be arranged to receive copy sheets exiting from a copying apparatus and may be operated selectively in a first mode in which all similar copy sheets are delivered to a particular bin, or in a second mode in which sheets are collated into a predetermined number of bins. Control circuitry is provided which includes a memory unit for storing a signal condition indicative of delivery of a copy sheet into the last bin of the predetermined number of bins and a manually operable switch for actuating the device to collate a subsequent series of sheets into bins subsequent to the last bin previously utilized.

Growing community of inventors

Asten, Netherlands

Theodorus Knoops