U.S. Philips Corporation

Theodorus F Lamboo

Hans G Van Den Brink

Gijsbertus Bouwhuis

Bauke J Roelevink

Johannes H Van Kleef

Martinus J Van Heel

Albertus J Van Hoof

Low-pressure mercury vapor discharge lamp with an emission spectrum according to a spectral energy distribution comprising the wavelength ranges 380-490 nm, 490-590 nm, and 590-700 nm, within which wavelength ranges mutually equal or substantially equal quantities of energy are emitted with a tolerance of 25% for the mutual ratios of equal energy of 1:1:1.

Low-pressure mercury vapor discharge lamp suitable for illuminating a

A housing having a front wall which is transparent to ultraviolet radiation, and an array of low-pressure mercury vapor discharge lamps arranged parallel to each other. At least the back facing half of each lamp is coated with an ultraviolet reflecting layer, and the lamps are spaced from each other a distance of less than one-fifth their outside diameters, so that ultraviolet radiation from the panel is maximized.

Ultraviolet irradiation panel

By surrounding a gas discharge laser, which comprises a cylindrical glass envelope provided at two ends with laser mirrors which together constitute an optical resonator, at least partly and substantially coaxially with a sheath which is secured around the envelope by means of very slack resilient elements, for example rubber blocks or metal springs, varying temperature gradients in the envelope as a result of the gas discharge are substantially prevented so that the initial alignment of the laser beam does not vary substantially.

Gas discharge laser device

A shock-proof gas discharge laser device comprises a cylindrical discharge vessel secured coaxially in a metal tubular holder. The cylindrical discharge vessel is sealed at its two ends with sealed metal end plates provided with supports for multilayer reflectors. The metal end plates are centered in beaker-shaped insulator caps which surround the end plates. The cylinder surface of the caps extend at least partly within the metal tubular holder in contact therewith. The electrical connections of the gas discharge laser are provided in said caps.

A gas discharge laser comprising a glass cylindrical discharge vessel having at least one end sealed by means of a metal cap provided at its center with a reflector body and in which a metal exhaust tube is connected eccentrically to the cap. By forming the metal cap in the shape of a truncated cone and providing the metal exhaust tube in the conical surface therof, a gas discharge laser having a high degree of directional stability is obtained.

Gas discharge laser

A method and arrangement for aligning a mask comprising a mask-pattern relative to a substrate when the mask-pattern is repeatedly and directly imaged on the substrate, gratings in the mask and gratings on the substrate (phase gratings) being employed as alignment references. The gratings in the mask are located outside the mask pattern and the phase gratings are located on the substrate outside the area where the mask-pattern is imaged. The substrate (phase) gratings are imaged on one of the mask gratings with a projection system which is also used for projecting the mask-pattern on the substrate. The image of the gratings on the grating in the mask is adjusted. Thus, a very accurate alignment can be achieved.

Method and arrangement for aligning a mask pattern relative to a

A method of adjusting an optical element of a gas discharge laser, which element is provided at one end of a tubular metal support with the support in turn secured to the laser tube, by drawing a tubular section of the support beyond the yield point of the metal of which the tubular section consists during or after adjustment of the optical element by deformation of the tubular section throughout the circumference. An accurate adjustment of the element thereby takes place in a simple manner in which no stresses remain in the material which might otherwise maladjust the laser. The tubular section preferably consists of copper or nickel.

Method of adjusting gas laser mirror

A holder supporting a gas laser holder has two pair of leaf springs, each pair being situated in a plane at right angles to the longitudinal axis of the gas discharge laser and on either side of said laser, thereby isolating the laser device from bending moments as a result of temperature gradients in the laser or holder.

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Eindhoven, Netherlands

Theodorus F Lamboo