Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asm Lithography B.v. (1 from 29 patents)
1 patent:
1. 5144363 - Apparatus for and method of projecting a mask pattern on a substrate