Pitney Bowes Inc.

The Perkin-Elmer Corporation

United Technologies Corporation

Theodore Watkin

Gary G Hansen

Leonard M Pengue

Carl J Giannatto

There is disclosed a system for storing a projection mask of the type used for printing integrated circuit patterns on silicon wafers. A special cassette package permits the mask to be stored in a clean sealed environment. A delivery system transports the sealed cassette into an optical projection instrument wherein the cassette is opened and the mask advanced to the projection stage. After projection, the mask is returned and automatically sealed into the cassette. The cassette may be evacuated or, alternatively, filled with a clean gas. The mask sealed in the cassette can then be stored until its use is again required.

Projection mask storage and carrier system

Disclosed is a mechanism for feeding unit documents, such as sheets, envelopes, pages, cards, and the like to an apparatus for processing. A mechanism is provided for feeding the documents to and removing them from the operating apparatus at a relatively high rate of speed. During the time that an individual document is being operated upon it is conveyed by a mechanism associated with the operating apparatus. Examples of such operations would be printing addresses on an envelope, embossing credit cards, encoding magnetic tapes, and the like. Upon conclusion of the operation, the documents are removed quickly so that a second document may be supplied to the operating apparatus expeditiously.

Unit document feeding mechanism

A temperature control system for adjusting the temperature of a projection mask to cause it to align optically with a wafer, and thereafter, to automatically maintain the temperature differential between the mask and wafer constant.

Temperature compensated alignment system

Disclosed is a means for feeding unit documents, such as sheets, envelopes, pages, cards, and the like to an apparatus for processing. Means is provided for feeding the documents to and removing them from the operating apparatus at a relatively high rate of speed. During the time that an individual document is being operated upon it is conveyed by means associated with the operating apparatus. Examples of such operations would be printing addresses on an envelope, embossing credit cards, encoding magnetic tapes, and the like. Upon conclusion of the operation, the documents are removed quickly so that a second document may be supplied to the operating apparatus expeditiously.

A retractable radome assembly is comprised of a number of hollow casings having successively smaller transverse dimensions, disposed to permit nesting of a smaller dimension casing within a next adjacent larger dimension casing in a vacuum sealing relationship and in such a manner as to permit relative mobility of adjacent casings in a coaxial telescoping manner from a fully retracted to a fully extended coaxial position. The casing sections are maintained in the fully extended position through forces created by a differential pressure between the outside atmosphere and a vacuum atmosphere provided within the casing wall structure, the radome being maintained in the fully retracted position through the use of mechanical retracting assembly applied in the absence of a vacuum atmosphere within the wall structure.

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Stamford, CT, United States of America

Theodore Watkin