Lsi Logic Corporation

Lsi Corporation

Theodore O Meyer

Nima A Behkami

Thomas C Hann, Jr

Mark D Meyer

A data collection system. A data input form receives data, and a message queue receives the data from the data input form, and temporarily manages the data until the data collection system can process the data. A temporary data storage temporarily stores the data received by the message queue while waiting for the data collection system to process the data. A transaction manager receives the data from the message queue and processes the data. A data logger logs the processing transactions of the transaction manager. A data loader receives the data from the transaction manager and prepares the data for storage. A data storage device receives the data from the data loader.

Process control data collection

A method for marking a wafer that is cut from a boule. A surface of the boule is marked with an encoded marking that extends completely along a distance of the boule that is used for cutting wafers. The encoded marking is disposed substantially parallel to a length axis of the boule. The wafer is cut from the boule from within the distance, such that the encoded marking along the surface of the boule is disposed at a peripheral edge of the wafer. The encoded marking contains information in regard to the wafer.

Nonintrusive wafer marking

A method for determining an up time of a multi-component tool having discrete elements, where the up time determination is based upon different processes that are to be accomplished in the multi-component tool. The discrete elements of the multi-component tool and the different processes to be accomplished in the multi-component tool are identified. Different tool states for the multi-component tool are determined by setting element states for each of the discrete elements of the multi-component tool. A first possible element state indicates that the discrete element is functional, and a second possible element state indicates that the discrete element is nonfunctional. Possible combinations of the element states of the discrete elements are identified as the different tool states of the multi-component tool. A determination is made as to which of the different processes can be accomplished in the different tool states, and a percentage of time usage is determined for the allocation of the multi-component tool to each of the different processes. Rates associated with combinations of the different tool states with the different processes are determined. Process state efficiencies are determined from the rates and the percent of time usage allocated to the processes associated with the rates. A preliminary state efficiency for the different tool states is determined from the process state efficiencies associated with the different tool states. Percent of time conditions are determined for the different tool states, where the percent of time conditions represent ratios of time that the multi-component tool exhibits the associated tool state. The final state efficiencies for the different tool states are determined from the percent of time conditions and the preliminary state efficiencies associated with the different tool states, and the up time is determined from the final state efficiencies.

Cluster tool reporting system

A computerized engineering database feedback system provides special processing instructions for processing materials in a production process, and provides historical information related to the materials processed according to the special processing instructions. The system includes a request entry device through which requesting personnel may input special processing information indicating a way to process the materials differently from a normal way of processing of the materials. An instruction processing device receives the special processing information and generates the special-processing instructions based thereon. A process station device receives the special-processing instructions, and presents the special-processing instructions to material-processing personnel. The process station device also provides for inputting material information from the material-processing personnel, where the material information indicates one or more characteristics of the material processed according to the special-processing instructions. The system also includes a relational database in which the special processing information and the material information are compiled and related. An information retrieval device accesses the relational database, searches the relational database for material information related to special processing information, or searches the relational database for special processing information related to material information. Using the system, an engineer who wishes to have a lot of material processed in a special way for an engineering experiment may provide process operators with special-processing instructions. The system also allows the process operators to input information and test data related to the material that is processed according to the special instructions. Further, the system makes the results of the engineering experiment readily available to the company community in the relational database. By accessing the database, company engineers may view the results of previously-conducted experiments, and may thereby avoid wasting company resources by unnecessarily repeating the same experiments.

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Portland, OR, United States of America

Theodore O Meyer