Average Co-Inventor Count = 4.00
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Novellus Systems Incorporated (4 from 993 patents)
4 patents:
1. 8883640 - Sequential station tool for wet processing of semiconductor wafers
2. 8450210 - Sequential station tool for wet processing of semiconductor wafers
3. 8026174 - Sequential station tool for wet processing of semiconductor wafers
4. 7189647 - Sequential station tool for wet processing of semiconductor wafers