Lsi Logic Corporation

Theodore C Moore

Gregory Burns

Newell E Chiesl

David W Daniel

Crystal J Hass

A method of detecting presence of a polishing slurry on a semiconductor wafer subsequent to polishing of the wafer includes the step of adding a chemical marker to the polishing slurry. The method also includes the step of polishing a first side of the wafer in order to remove material from the wafer. In addition, the method includes the step of applying the polishing slurry to the first side of the wafer during the polishing step. Moreover, the method includes the step of ceasing the polishing step when the wafer has been polished to a predetermined level. Yet further, the method includes the step of directing incident electromagnetic radiation onto the wafer subsequent to the ceasing step. The method also includes the step of detecting a physical characteristic of resultant electromagnetic radiation which is produced in response to the incident electromagnetic radiation being directed onto the wafer. Moreover, the method includes the step of determining presence of the chemical marker so as to determine presence of the polishing slurry on the wafer based on the physical characteristic of the resultant electromagnetic radiation. A polishing system for polishing a semiconductor wafer is also disclosed.

Method and apparatus for detecting presence of residual polishing slurry subsequent to polishing of a semiconductor wafer

The present invention provides a method for manufacturing a semiconductor device on a substrate. The process involves denuding the substrate by heating to create a denuded zone within the substrate. A screen oxide layer is formed prior to implanting ions into the substrate. This oxide layer remains during the implantation step. The screen oxide layer is removed when forming gates for the semiconductor device.

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Woodland Park, CO, United States of America

Theodore C Moore