Horiba Jobin Yvon Sas

Horiba France Sas

Thanh-Liem Nguyen

Olivier Acher

Simon Richard

Alexander Podzorov

Jean-Paul Gaston

Géraldine Melizzi

Brice Villier

Disclosed is an ellipsometer or scatterometer including a light source, a polarizer, an optical illumination system suitable for directing an incident polarized light beam towards a sample, a wavefront-division optical beam splitter arranged to receive a secondary light beam produced by reflection, transmission or diffraction, the wavefront-division optical beam splitter being oriented to form three collimated split beams, an optical polarization modification device and an optical polarization splitting device to form six angularly split beams, a detection system suitable for detecting the six split beams, and a processing system suitable for deducing therefrom an ellipsometric or scatterometric measurement.

Instantaneous ellipsometer or scatterometer and associated measuring method

An accurate and robust wavefront-division polarimetric analysis method and device, allows the quasi-instantaneous measurement of the polarization states of a luminous object. The device can be used to produce a plurality of light beams, all polarized according to different polarization states, from a single upstream light beam. The polarized light beams, which do not overlap and which carry information items that are complementary in terms of polarization, are analyzed simultaneously by a plurality of detectors that measure the luminous intensity of each beam. Processing elements digitally process the luminous intensity values obtained in order to determine the polarization state of the upstream light beam. The operations performed by the processing elements prevent luminous intensity variations in the split light beams during the division of the wavefront of the upstream light beam. Therefore, the wavefront-division polarimetric analysis device is robust and its accuracy is not hindered by the experimental conditions.

Wavefront-division polarimetric analysis method and device, spectropolarimeter, polarimetric camera and optical microscope using such a device

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Massy, France

Thanh-Liem Nguyen