Canon Kabushiki Kaisha

Tetsuzo Mori

Kunitaka Ozawa

Katsunori Hatanaka

Tetsuo Suzuki

Tadashi Shiina

Ryuichi Ebinuma

Masakazu Ozawa

Shunichi Uzawa

Makoto Takaoka

Susumu Sugiura

Hiroyuki Ichikawa

Takashi Sugino

Noriyasu Hasegawa

Noboru Koumura

Isamu Shimoda

Koji Uda

Masa K Ozawa

Takashi Nakamura

Masayuki A Suzuki

Takahiro Matsumoto

Yutaka Tanaka

Minoru Yoshii

Shinichi Hara

Koichi Sentoku

Noriyuki Nose

Seiji Takeuchi

Nobutoshi Mizusawa

Kazuyuki Kasumi

Hiroshi Kurosawa

Toshihiko Tsuji

Eiji Sakamoto

Kazunori Iwamoto

Yuji Chiba

Akira Katayama

Kyoichi Miyazaki

Hidehiko Fujioka

Mitsuji Marumo

Shinichirou Uno

Ryuichi Ebinuna

A video signal encoding apparatus comprises a decoding unit for decoding each compression still image data into a frame image; a supplementary information, extracting unit for extracting supplementary information added to each compression frame image data; a motion prediction process adoption judging unit for judging, on the basis of the supplementary information, whether the frame image can be subjected to a motion prediction process; and a compression moving image generating unit for selecting the inter-frame prediction encoding method and the intra frame encoding method on the basis of a judgement result by the motion prediction process adoption judging unit to generate the moving image data.

Video signal encoding apparatus and video data encoding method

A signal processing apparatus supplied with a signal obtained by performing orthogonal transform on a video signal corresponding to a plurality of pixels includes a correction circuit for correcting the orthogonal-transformed signal, by using correction values obtained by performing orthogonal transform equivalent to the orthogonal transform on measured values obtained by measuring nonuniformity of display characteristics of a display device, which performs display on the basis of a signal processed by the signal processing apparatus. In addition, an inverse orthogonal transform device performs inverse orthogonal transform on a signal corrected by the correction circuit and thereby obtains a corrected video signal.

Signal processing apparatus, signal processing method, correction value generation apparatus, correction value generation method, and display apparatus manufacturing method

A recording apparatus having a memory for storing recording data, and an address counter for controlling addresses in the memory in the direction of the columns or rows. The address counter controls a read start address for starting a process of reading the memory, thereby compensating for deviations in the longitudinal or widthwise direction of recording paper.

Printer apparatus

A method of measuring information related to an object, includes the steps of measuring a change of a measurement error with respect to time, and determining the frequency of measurements for measuring the measurement error, to be done during a measurement period, on the basis of the change in measurement error. Then, in the measurement period, a measured value is corrected by using a latest measurement error.

Measuring method and apparatus for measuring system having measurement

A scanning exposure apparatus includes a supplying system for supplying exposure light to a substrate to be scanned in a direction. The exposure light has a predetermined intensity distribution in the direction of scan, a detecting device for detecting the light quantity of the exposure light, and a control system for controlling the supplying system on the basis of the light quantity and the predetermined intensity distribution of the exposure light.

Scanning exposure apparatus and device manufacturing method using the

A stage mechanism suitable used in an exposure apparatus is disclosed, wherein heat generation of a coil assembly of a stage driving motor is prevented from adversely affecting a semiconductor substrate or measurement by a laser interferometer. A wafer chuck and the laser interferometer are disposed at a side of a base plate, and a stage and an electromagnetic coil for dirving the stage are disposed at the other side of the base plate. The wafer chuck and the stage are coupled to each other by a coupling member which extends through a bore formed in the base plate.

Stage mechanism in exposure apparatus

A method and apparatus for measuring relative positional deviation between first and second diffraction gratings formed on an object is disclosed, wherein, in detection of a signal corresponding to the relative positional deviation between the first and second diffraction gratings, a suitable delay is determined in accordance with a signal corresponding to a relative positional deviation between third and fourth diffraction gratings formed on the object and having a predetected relative positional deviation, and wherein the measurement of the positional deviation between the first and second diffraction grating is done on the basis of a signal corresponding to that deviation and of the delay thus determined.

Method and apparatus for detecting positional deviation by using

Disclosed is an inspection method and apparatus: wherein (i) first light having a first state of polarization and a first wavelength, and (ii) second light having a second state of polarization, different from the first state of polarization, and a second wavelength, different from the first wavelength are produced; at least the first light is projected to a position of inspection; and heterodyne interference light produced on the basis of the second light and light scattered at the inspection position and having its state of polarization changed, by the scattering, from the first state of polarization, is detected.

Inspection method and apparatus for inspecting a particle, if any, on a

A recorder comprises a recording device housing for housing a device for forming a record on record medium at a record position and a relatively movable stacker for stacking record media recorded by the recording device and having an open side for removing the stacked media. A convex area on the bottom of the stacker extends othogonally to the length of the stacker at a position spaced from the lengthwise center of the stacker toward the open side. The convex portion inhibits movement of the stacked media which could occur through shocks received by the recorder.

Recorder having a paper stacker that inhibits inadvertent movement of

Exposure control method and apparatus particularly suitably usable in an X-ray exposure apparatus, for exposing a mask and a wafer to radiation (X-rays) from a synchrotron to transfer a pattern formed on a mask onto the wafer, is disclosed. A shutter device for controlling passage and interception of the synchrotron radiation is provided between the synchrotron and the wafer. The shutter device includes a blade member having a leading edge and a trailing edge which are rectilinearly movable in a direction in which there exists non-uniformness in illuminance of the radiation. The leading edge is used to determine the timing of start of passage of the radiation to the wafer, while the trailing edge is used to determine the timing of interception of the radiation. The moving speeds of the leading edge and the trailing edge are controlled independently of each other to provide different exposure times for different portions of an exposure region on the wafer, in accordance with the non-uniformness in illuminance. By this, the amount of absorption of radiation by a resist material on the wafer can be make uniform throughout the exposure region.

Exposure control in an X-ray exposure apparatus

A recorder has a recording apparatus housing and a feeding apparatus housing hinged together for assuming open and closed positions. The recording apparatus housing holds recording apparatus and the feeding apparatus housing holds only feeding apparatus. When the housings are in the closed position, the feeding apparatus feeds paper past the recording apparatus. When they are in the open position, the recording and feeding apparatus are both exposed for easy access.

Recorder having separate recording means and feeding means housings

There is described a color image processing apparatus in which time-sequential color image signals are converted into parallel by a delay circuit, then subjected to a desired image processing and again converted into time-sequential color image signals, thus achieving image processing in a simple inexpensive circuit.

Color image processing apparatus

A vacuum-attraction holding device includes a holding base having an attracting surface, for holding a substrate thereon; a suction passageway formed in the base, for supplying a vacuum to the holding base to attract the substrate to the attracting surface; and a pressure sensor provided in the base and being communicated with the suction passageway.

Vacuum chuck

The present invention relates to a temperature control system for a lithographic exposure apparatus wherein a mask and wafer are closely disposed, and predetermined exposure energy is applied to respective shot areas of the wafer through the mask. The exposure energy is a soft-X-ray source, for example. The pattern of the mask is transferred onto the respective shot areas in a step-and-repeat manner. In the apparatus, a temperature control medium liquid is supplied into the wafer chuck which supports the wafer at the exposure position. The flow rate of the temperature control liquid is different during an exposure operation than during a non-exposure-operation. The flow control is determined in consideration of the wafer chuck vibration attributable to the supply of the liquid medium and also, of the heat generation in the wafer by the exposure energy, so that the vibration of the wafer chuck during the exposure operation is suppressed. Simultaneously the temperature rise of the wafer can also be suppressed. The pattern transfer from the mask to the wafer thus be precisely performed.

Growing community of inventors

Atsugi, Japan

Tetsuzo Mori