Shimadzu Corporation

Tetsuya Yoneda

Satoshi Tokuda

Susumu Adachi

Takuro Izumi

Kenji Sato

Takao Marui

Masashi Matsuo

An X-ray fluorescence analyzer is provided inside an analysis chamber covered with a housing with: an X-ray tube; an analyzing crystal for spectrally dispersing X-ray fluorescence emitted from a sample; an X-ray detector for detecting the X-ray fluorescence spectrally dispersed by the analyzing crystal; a warm air generator for generating warm air to maintain a temperature of the analyzing crystal at a target temperature; and a Peltier element for cooling the X-ray detector.

X-ray fluorescence analyzer

A dispersive element is provided with a dispersive crystal for spectrally dispersing X-rays, a first support layer supporting the dispersive crystal, and a second support layer supporting the first support layer. The first support layer is greater in a thermal expansion coefficient than the dispersive crystal. The second support layer is smaller in a thermal expansion coefficient than the first support layer and is greater in rigidity than the first support layer.

Dispersive element

A chemical state analysis apparatusincludes: an excitation sourceconfigured to irradiate an irradiation region A of a predetermined surface in a sample S containing a battery material with an excitation rays for generating characteristic X-rays of the battery material; an analyzing crystalof a flat plate arranged so as to face the irradiation region A; a slitarranged between the irradiation region A and the analyzing crystal, the slit being arranged in parallel to the irradiation region A and a predetermined crystal plane of the analyzing crystal; an X-ray linear sensorin which linear detecting elementseach having a length in a direction parallel to the slitare arranged in a direction perpendicular to the slit; a wavelength spectrum generation unitconfigured to generate a wavelength spectrum based on intensity of the characteristic X-rays detected by the X-ray linear sensor; a peak wavelength determination unitconfigured to determine a peak wavelength which is a wavelength in a peak of the wavelength spectrum; and a chemical state specification unitconfigured to specify a value for specifying a chemical state of the battery material in the sample S from the peak wavelength determined by the peak wavelength determination unitand a standard curve representing a relation between a value representing the chemical state and the peak wavelength.

Apparatus and method for analyzing chemical state of battery material

An X-ray spectrometer includes: an excitation source that irradiates a predetermined irradiation region on a surface of a sample with an excitation ray generating a characteristic X-ray; a flat plate analyzing crystal facing the irradiation region; a slit provided between the irradiation region and the analyzing crystal, the slit being parallel to a predetermined crystal plane of the analyzing crystal; a linear sensor including linear detection elements having a length in a direction parallel to the slit are arranged in a direction perpendicular to the slit; and an energy calibration unit that measures two characteristic X-rays in which energy is known by irradiating a surface of a standard sample generating the two characteristic X-rays with the excitation ray from the excitation source, and calibrates the energy of the characteristic X-ray detected by each detection element of the X-ray linear sensor based on the measured energies of the two characteristic X-rays.

X-ray spectrometer and chemical state analysis method using the same

An analyzer capable of having a pressure value converge to a set vacuum value P in a short time is provided. An analyzer includes a sample chamber in which a sample is placed, an analysis chamber including an X-ray tube and a detector, a gate valve switching between a connecting state where the inside of the sample chamber and the inside of the analysis chamber are connected together and a disconnecting state where the insides of the chambers and are disconnected from each other, a vacuum pump and a pressure regulatory valve connected to the inside of the sample chamber and the inside of the analysis chamber, and a control unit controlling the degree of opening of the pressure regulatory valve to set the internal pressure of the sample chamber and the internal pressure of the analysis chamber at respective set pressure values in the connecting state.

Analysis device

The detection surface of each of a plurality of detection elements is arranged on an arc along a diffractometer circle (reference circle). This allows each detection element to detect X-rays diffracted by a specimen at the focal position. Because this prevents errors in the X-ray intensity detected by each detection element, more accurate diffraction information can be obtained. As a result, a more accurate analysis can be performed in less time by detecting X-rays diffracted by the specimen using a plurality of detection elements.

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Kyoto, Japan

Tetsuya Yoneda