Nikon Corporation

Tetsuya Tomofuji

Keiichi Akagawa

Hideki Komatsuda

Masahiro Shoda

Hideo Takino

Kohtaro Kasashima

An exit-side fly-eye mirror is provided with a first mirror block having a mirror element as one of a plurality of mirror elements, and a second mirror block having a mirror element as one of the plurality of mirror elements. The first mirror block has a connecting part that protrudes from an area other than the mirror surface of the mirror element, the connecting part providing a connection to the second mirror block. With the connecting part of the first mirror block, a plurality of mirror elements that includes the mirror element of the second mirror block is positioned relative to the mirror element of the first mirror block.

Reflecting optical member, optical system, exposure apparatus, and device manufacturing method

An optical membrane forming apparatus comprises a vacuum chamber (7), a lens holder (2) placed in the chamber (7) for holding one or more lenses (3) in such a manner that each lens (3) is rotational about its axis, and that the lens holder (2) itself is rotational about its own axis, and a plurality of vaporization sources (10a-10c) placed in the chamber (7). Each of the vaporization sources (10a-10c) produces vaporized particles for forming a layer of the membrane on the surface of the lens (3). The vaporization rate of the plurality of vaporization sources are independently controlled. A diaphragm plate (4) is placed between the vaporization sources (10a-10c) and the lenses (3) in order to control the direction of diffusion of the vaporized particles. Each of the sources (10a-10c) has a sample container which is partitioned into a plurality of rooms to store different samples.

Optical membrane forming apparatus and optical device produced by the

A power source is electrically connected to a capacitance element arranged corresponding to either a Shottky barrier diode (SBD) or a bolometer at a predetermined timing through a resistor by a driving pulse provided from a horizontal scanning circuit and a driving pulse provided from a vertical scanning circuit. At this time, charges charged by a voltage of the power source in the Shottky barrier diode are discharged by either a reverse current of the Shottky barrier diode or a current through the bolometer, immediately after the power source is disconnected from the capacitance element, arranged for either the Shottky barrier diode or the bolometer. After a storing period of time, when the power source and the capacitance element are connected, the charges corresponding to the charge amount discharged for the storing period of time are charged in the capacitance element. At this time, a voltage according to the charge amount is provided. Thus, an infrared-ray image sensor can be obtained using a Shottky barrier diode or a bolometer.

Infrared-ray image sensor

An infrared solid-state image sensing apparatus is provided with a plurality of photoelectric converting sections arranged vertically and horizontally in a matrix pattern on a semiconductor substrate of a first conducting type; a plurality of vertical CCDs which have first buried channels of a second conducting type and electrodes disposed thereon with an insulating film between and which are disposed adjacently to the photoelectric converting sections; and a horizontal CCD having a second buried channel of the second conducting type and electrodes disposed thereon with an insulating film between and which is disposed adjacently to one side of the vertical CCDs. The first and second buried channels are provided with a low-concentration region having a uniform diffusion depth. Further, the surface of each first buried channel is provided with a high-concentration region of the second conducting type having a higher concentration than that of the surface of the second buried channel.

Growing community of inventors

Kawasaki, Japan

Tetsuya Tomofuji