Sharp Kabushiki Kaisha Corporation

Kimmon Quartz Co., Ltd.

Tetsuya Tarui

Hidenobu Kimoto

Toshihiko Hirobe

Yoshitaka Hibino

Yoshihiro Seguchi

Takehisa Sugimoto

Naofumi Kondo

Takehiko Kawamura

Hajime Onoda

Hiromitsu Asano

There are provided a display device including a highly reliable wiring having excellent adhesion to an insulating film, and a method for manufacturing the same. A molybdenum-niobium layer has good adhesion to an insulating film, and thus, a first wiring having the molybdenum-niobium layer as an upper layer wiring is tightly adhered to a gate insulating film which is formed on the surface of the upper layer wiring. When there is a need to exchange a semiconductor chip mounted on a connection terminal that is provided at an end portion of a wiring such as a gate lead line or a source lead line formed of the first wiring, an ACF which was used for pressure-bonding of the semiconductor chip remains on the connection terminal even if the semiconductor chip is peeled off. To thoroughly remove the ACF, a force has to be applied to the connection terminal, but because the gate insulating film is tightly adhered to the molybdenum-niobium layer, the gate insulating film protecting the periphery of the connection terminal is not easily peeled off.

Method for manufacturing display device including a wiring layer of a molybdenum-based material

An active matrix substrate for a liquid crystal panel of an FFS mode includes a plurality of connecting units in a connecting region in order to electrically connect a common electrode, a first common main wiring, and a second common main wiring. The connecting unit includes a contact holethat connects a connecting electrodeand the first common main wiring, the connecting electrodeformed integrally with the common electrode, and a contact holethat connects the connecting electrodeand the second common main wiring. An amorphous Si filmof the second common main wiringis formed larger than a main conductor partof the second common main wiringin a position of the contact hole, and is covered with SiNx filmsthat are protective insulating films. This prevents the connecting electrode from having a step disconnection at a pattern end of the common main wiring.

Active matrix substrate, liquid crystal panel, and method for manufacturing active matrix substrate

An active matrix substrate in a liquid crystal panel of an FFS mode has a data lineincluding an amorphous Si film, an n+amorphous Si film, a main conductor part, and an IZO film. The main conductor partand the IZO filmare etched at a portion close to the end of a covered region of a photoresist, to form the n+amorphous Si filmlarger than the main conductor partand the IZO film. A pattern of a photomask for a source layer is made larger than a pattern of a photomask for a pixel electrode layer, to form the amorphous Si filmlarger than the n+amorphous Si film. The main conductor partis formed of a molybdenum-based material, and in a layer over the data line, two-layered protective insulating films are formed such that a compressive stress is generated in one film and a tensile stress is generated in the other film. Accordingly, a high-yield active matrix substrate having a common electrode is provided.

Active matrix substrate and method for manufacturing the same

A liquid crystal display including an active matrix substrate furnished with a matrix of TFTs, in which a plurality of TAB substrates each having a driver IC are connected to the active matrix substrate through an ACF, and the driver ICs are connected to source bus lines through the ACF. Also, adjacent driver ICs disposed on the mounting substrates are connected to each other through common connection lines formed on the active matrix substrate. Consequently, the size and weight of the mounting substrates used to provide the driver ICs and lines connected to the same can be reduced, thereby making it possible to provide a light and inexpensive liquid crystal display having a small frame edge portion.

Liquid crystal display having a plurality of mounting substrates with common connection lines connecting the mounting substrates

A liquid crystal display device includes: a source electrode (gate electrode) having an Al or Al alloy layer; a pixel electrode provided above the source electrode (gate electrode); and interlayer insulator films interposed between the source electrode (gate electrode) and the pixel electrode by depositing a TFT protection film as an inorganic insulator film and an organic insulator film in this sequence when viewed from the source electrode, so as to cover the source electrode (gate electrode).

Liquid crystal display device and method of manufacturing the same

A substrate drying apparatus comprises a treatment vessel for containing IPA in the form of liquid, an IPA source for supplying IPA into the treatment vessel, a first heat exchanger which is equipped with a heat exchanger tube dipped in IPA and allowing steam to pass therein, the first heat exchanger allowing the steam and IPA to perform heat exchange therebetween to thereby evaporate IPA, and a second heat exchanger provided on or above an upper portion of the treatment vessel and equipped with a heat exchanger tube for allowing a coolant to pass therein, the second heat exchanger allowing the coolant and the evaporated IPA to perform heat exchange therebetween to thereby condense the evaporated IPA.

Growing community of inventors

Sakai, Japan

Tetsuya Tarui