Tokyo Ohka Kogyo Co., Ltd.

Tetsuya Nakajima

Akira Hashimoto

Hideya Kobari

Yoshimi Sato

Atsushi Kawakami

Toshimasa Nakayama

Hidekatsu Kohara

Kousuke Doi

Mitsuo Hagihara

It is disclosed a dielectric element comprising a lower electrode, a dielectric layer, and an upper electrode which are provided on a substrate, in which at least one of the electrodes is a Pt layer, a Ru layer is used as a base layer for the Pt layer. In the fabrication of the dielectric element, the Pt layer is formed by electroplating, a photoresist pattern is used as a plating mask, and an Ru layer is formed as a seed layer. The present invention makes it possible to provide a dielectric element using Pt as an electrode material, that is capable of easily forming a Pt electrode having excellent electrical characteristics without generating voids or seams, that is capable of forming a fine pattern, and that does not occur contamination in a processing chamber, and a method for fabricating a dielectric element of having the characteristics mentioned above.

Dielectric element and method for fabricating the same

Polyphenol compound, quinonediazide ester and positive photoresist

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Kanagawa-ken, Japan

Tetsuya Nakajima