Rorze Corporation

Tetsuya Nagao

Fumio Sakiya

Yasuhisa Sato

Toshiyuki Ikeda

In order to automate the positioning at respective ports at the start-up of an equipment in a semiconductor manufacturing equipment equipped with a positioning device and a carrying robot and enhance productivity, 2 points Wand Wat which the circumference of a disc-like objectsuch as a wafer and the locusof a detection means cross are detected, and the center position A of a disc-like object is calculated using the specific point O on the perpendicular bisectorof the section of a line combining 2 points with these and the radius r of the disc-like object. Thereby, the carrying robot could carry out the positioning work and not only the correction of a carrying route but also the reference position teaching at the start-up of equipment could be automated using the result.

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Kannabe-cho, Japan

Tetsuya Nagao