Adv Antest Corporation

Tetsuya Kuitani

Tadao Saito

Yoshihiro Abe

Shigeru Matsumura

Shin Sakiyama

To test a probe card with an examination apparatus that tests a device under test, provided is a test system that tests a device under test and includes a test section that includes a plurality of test units that input or output a signal; a probe card that includes a plurality of probe terminals connected to a terminal of the device under test, and transmits signals between the device under test and the test section; and a wafer for testing that is connected to the probe card, instead of the device under test, when testing the probe card, and includes a connection wire that electrically connects two of the probe terminals to each other. The test section measures output of at least one of two test units connected to the two probe terminals, and judges pass/fail of the two probe terminals.

Wafer for testing and a test system

A contactor and an associated contact structure, probe card and test apparatus are provided. The contact may include a base part having three or more steps in a stairway state, a support part with a rear end side provided at the base part and a front end side sticking out from the base part, and a conductive part formed on a surface of the support part and electrically contacting a contact of a device under test.

Contactor, contact structure, probe card, and test apparatus

A probe card having a plurality of silicon finger contactors contacting pads provided on a tested semiconductor wafer and a probe board mounting the plurality of silicon finger contactors on its surface, wherein each silicon finger contactor has a base part on which a step difference is formed, a support part with a rear end side provided at the base part and with a front end side sticking out from the base part, and a conductive part formed on the surface of the support part, each silicon finger contactor mounted on the probe board so that an angle part of the step difference formed on the base part contacts the surface of the probe board.

Method of production of a contact structure

Contactor, contact structure provided with contactors, probe card, test apparatus, method of production of contact structure, and production apparatus of contact structure

A contact terminal for measurement is provided, for transmitting a signal between a desired probe pin among a plurality of probe pins arranged in parallel at a predetermined distance in a predetermined direction on the surface of a probe substrate and an external measurement apparatus. The contact terminal for measurement includes: a signal terminal having an width smaller than the distance between the probe pins provided on both sides of one probe pin in the arrangement direction; two ground terminals to which a ground potential is applied, which are provided on both sides of the signal terminal in the arrangement direction and which have each width larger than that of the signal terminal in the arrangement direction; and a signal line electrically connecting the signal terminal to a signal input terminal of the external measurement apparatus.

Growing community of inventors

Tokyo, Japan

Tetsuya Kuitani