Nippon Sanso Corporation

Other

Taiyo Nippon Sanso Corporation

Tetsuya Kimijima

Akira Nishina

Tsutomu Kikuchi

Shang-Qian Wu

Yoshio Ishihara

Tadahiro Ohmi

Makoto Tanaka

Masato Kawai

Tetsuya Sato

Hidetoshi Yoshida

Tetsuya Satou

Kunio Matsuda

Ryuichi Yazaki

Shigeru Hayashida

Koh Matsumoto

Jun-ichi Morishita

Hitomi Umehara

Toru Nagasaka

This gas purifying process removes trace constituents from a mixed gas that includes a rare gas and nitrogen as main components, and at least one from among hydrogen, nitrogen and hydrogen reaction products, and water vapor as the trace constituent. This process sequentially carries out an adsorbing step for removing water vapor and nitrogen and hydrogen reaction products; a hydrogen oxidation step for converting the hydrogen into water vapor by means of a hydrogen oxidation catalytic reaction in the presence of oxygen; and a drying step for removing water vapor generated in the hydrogen oxidation step. When nitrogen oxides are included as a trace constituent, then a denitration step is carried out prior to the adsorbing step, to convert nitrogen oxides into nitrogen and water vapor by means of a catalytic denitration reaction in the presence of a reducing substance.

Gas purifying process and device

A method and an apparatus for measuring the concentrations of the components of a fluid are described, which can be used to measure the concentrations of the components continuously in real time and to monitor a high pressure gas, and is suitably used for in-line monitoring. In the method and the apparatus, a fluid sample is conducted through a measuring tube, wherein the measuring tube has a small aperture with a constant diameter in a fluid flow path. The pressure difference (P&#x2212;P) between the upstream and the downstream of the small aperture and the flow rate at the downstream of the small aperture are measured to determine the concentrations of the components of the fluid.

Method and apparatus for measuring concentrations of components of fluid

A method and an apparatus for measuring the concentrations of the components of a fluid are described, which can be used to measure the concentrations of the components continuously in real time and to monitor a high pressure gas, and is suitably used for in-line monitoring. In the method and the apparatus, a fluid sample is conducted through a measuring tube, wherein the measuring tube has a small aperture with a constant diameter in a fluid flow path. The pressure difference (P &minus;P ) between the upstream and the downstream of the small aperture and the flow rate at the downstream of the small aperture are measured to determine the concentrations of the components of the fluid.

Method and apparatus for measuring nitrogen in a gas

There is provided a method and an apparatus for collecting a rare gas, which are capable of effectively collecting the rare gas contained in an exhaust gas exhausted from a rare gas using apparatus such as a plasma apparatus or the like, and moreover capable of securely supplying the rare gas having a predetermined purity to the rare gas using apparatus, and the method for collecting rare gas which comprises collecting a rare gas contained in an exhaust gas exhausted from a rare gas using apparatus operated under decompression, the method comprises the step of collecting the rare gas by separating the rare gas and impurities contained in the exhaust gas via at least two gas separating steps.

Method and apparatus for collecting rare gas

There is provided a gas analyzing apparatus capable of minimizing gas remaining by integrating gas switching apparatuses into one and capable of analyzing impurities of ppb level to sub-ppb level contained in various kinds of high-purity gases efficiently and accurately. The gas analyzing apparatus comprises an analyzer introduction passage for introducing a sample gas supplied from a sample gas source into an analyzer via an analyzer introduction valve V; a separator introduction passage diverging from a first side passage of the analyzer introduction valve V for introducing a sample gas into a separator via a separator introduction valve V; a separator flowing-out passage for introducing the sample gas flowing out from the separator into a second side passage of the analyzer introduction valve V via a separator flowing-out valve V; and a gas switching apparatus to be such formed that when the analyzer introduction valve V is opened, the separator introduction valve V and the separator flowing-out valve V are connectively operated to be closed, and when the analyzer introduction valve V is closed, the separator introduction valve V and the separator flowing-out valve V are connectively operated to be opened.

Gas analyzing apparatus

Gas supplying apparatus and gas substitution method where machinery and parts constituting the gas system are not damaged, and where gas substitution in the gas system is carried out in a short time with good efficiency. The gas substitution, method for substituting a gas after switching into a gas supplying passage by switching the kind of gases to be supplied includes carrying out an operation for fluctuating a pressure in the gas supplying passage within a range of pressure limitation of component parts thereof until a concentration of a gas before switching remaining in the gas supplying passage becomes parts per billion (ppb) level while the gas after switching is made to flow in the gas supplying passage; setting the pressure to a predetermined pressure; and carrying out an operation for increasing a flow rate of the gas after switching in the gas supplying passage under a flow rate limitation of the component parts thereof until the concentration of the gas is before switching remaining in the gas supplying passage becomes sub-ppb level.

Gas supplying apparatus and gas substitution method

An analyzing apparatus for assaying various kinds of trace impurity contents in various kinds of high-purity gases, having an atmospheric pressure ionization mass spectrometer useful for determination of trace impurity contents in such high-purity gases on the ppb to sub ppb levels and a gas chromatograph integrated therewith, enabling high efficiency determination of trace impurity contents in high-purity gases. The analyzing apparatus having a gas chromatograph ( ) and an atmospheric pressure ionization mass spectrometer ( ), is provided with a system ( ) for introducing a sample gas introduced from a sample gas introduction source directly to the atmospheric pressure ionization mass spectrometer ( ); a system ( ) for introducing the sample gas via the gas chromatograph ( ) to the atmospheric pressure ionization mass spectrometer ( ); and a channel selector ( ) for changing over the channel of the sample gas to either of these two systems.

System for analyzing trace amounts of impurities in gases

There is provided a gas analyzing apparatus capable of minimizing gas remaining by integrating gas switching apparatuses into one and capable of analyzing impurities of ppb level to sub-ppb level contained in various kinds of high-purity gases efficiently and accurately. The gas analyzing apparatus comprises an analyzer introduction passage for introducing a sample gas supplied from a sample gas source into an analyzer via an analyzer introduction valve V; a separator introduction passage diverging from a first side passage of the analyzer introduction valve V for introducing a sample gas into a separator via a separator introduction valve V; a separator flowing out passage for introducing the sample gas flowing out from the separator into a second side passage of the analyzer introduction valve V via a separator flowing-out valve V; and a gas switching apparatus to be such formed that when the analyzer introduction valve V is opened, the separator introduction valve V and the separator flowing-out valve V are connectively operated to be closed, and when the analyzer introduction valve V is closed, the separator introduction valve V and the separator flowing-out valve V are connectively operated to be opened.

A process and an apparatus for treating an exhaust gas, in which a raw gas and high-boiling intermediate products contained in the exhaust gas let out from a CVD system employing a silicon-containing gas is brought into contact with a transition metal such as nickel or a silicide of such transition metals to decompose or convert them into stable halides, followed by detoxication treatment of the harmful components contained in the exhaust gas.

Method and device for treating exhaust gas

There are provided an apparatus for analyzing gases and a gas analyzing method which can securely detect presence and absence of leakage in a short time and which can carry out analyses successively, safely and accurately in a stable state. The apparatus for analyzing gases is provided with sample gas introducing systems (,to,) for introducing a plurality of sample gases selectively, and analyzers (,and,), and also has means (,) for monitoring, when a sample gas under determination is changed over to another sample gas, change in the concentration of the sample gas component introduced before the change over.

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Tokyo, Japan

Tetsuya Kimijima