Sumitomo Electric Industries, Limited

Canon Kabushiki Kaisha

Tetsuya Katayama

Osamu Komura

Akira Yamakawa

Masaya Miyake

Kenji Matsunuma

Kaoru Murabe

Matsuo Higuchi

Norio Yasuoka

Mikio Nakasugi

Taku Fukita

Chihiro Kawai

Isshin Sato

Takahiro Imai

Takashi Matsuura

Yoshihiro Akahane

Toshihiko Ushiro

An Si&#x2014;O containing hydrogenated carbon film as an optical film has a refractive index in a range from at least 1.48 to at most 1.85 for light of 520 nm wavelength and an extinction coefficient of less than 0.15 for light of 248 nm wavelength, wherein the refractive index and the extinction coefficient are decreased with energy beam irradiation. By utilizing such an Si&#x2014;O containing hydrogenated carbon film, it is possible to provide various types of optical elements and an optical device including the same.

Si-O containing hydrogenated carbon film, optical device including the same, and method for manufacturing the Si-O containing hydrogenated carbon film and the optical device

A dynamic-pressure gas bearing structure includes a sleeve, a column-like shaft fitted to the sleeve, and a plurality of shallow grooves formed on the outer peripheral surface of the shaft and extending in the axial direction of the shaft. The shallow grooves are formed by grinding in which grains are aligned to the aforementioned axial direction. An optical deflection scanning apparatus is provided with such dynamic-pressure gas bearing structure.

Dynamic-pressure gas bearing structure and optical deflection scanning

A slide member has a sliding surface made of ceramic and a has surface roughness of not more than 1.0 .mu.m in center line average roughness Ra. The ceramics includes a silicon nitride sintered body which contains crystal grains having a linear density of at least 35 per 30 .mu.m in length with a boundary phase volume ratio of not more than 15 volume %, and which contains pores of not more than 20 .mu.m in maximum diameter in a content of not more than 3%. In a method of manufacturing the slide member, it is possible to ensure smoothness of the sliding surface by grinding the sliding surface and thereafter heating the ceramic in an either an inert gas or atmospheric air. A slide member that can be used under severe sliding conditions of high-speed sliding or the like and that has excellent wear resistance is obtained. Even if the slide member is used for to a sliding part of a compressor or the like which employs a fluorocarbon containing no chlorine as a cooling medium, it is possible to prevent the occurrence of seizure and abnormal wear on the sliding surface.

Slide member and method of manufacturing the same

A dynamic-pressure gas bearing structure includes a columnar shaft made of a silicon-nitride-based ceramic sintered body, a hollow cylindrical sleeve opposed to the shaft as keeping a clearance in a radial direction, the sleeve being made of a silicon-nitride-based ceramic sintered body, and at least three flat face portions located on a peripheral surface of the shaft and at equal intervals to the circumference along the peripheral surface. The flat face portion includes a plurality of unit planes continuously formed at predetermined angles to a direction of the circumference on the peripheral surface of the shaft. The unit planes are formed so as to extend substantially in parallel with an axial direction of the shaft.

Composite bearing structure

A composite bearing structure can withstand high speed rotation has first, second and third bearing components. The first bearing component supports a radial impact force applied to a rotator during rotation, and is made of an inner ring (1) and an outer ring (2) of silicon nitride ceramic sintered bodies. The second bearing component supports an axial load applied to the rotator while maintaining a required clearance between itself and the rotator and is made of two permanent magnets (12, 13) positioned thrustdirectionally opposite to each other. The third bearing component maintains a radial rotational accuracy of the rotator, and is made of a radial dynamic pressure producing groove (5) provided on a cylindrical surface of the inner ring (1).

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Itami, Japan

Tetsuya Katayama