Seiko Epson Corporation

Tetsuya Isshiki

Hiromu Miyazawa

Koji Sumi

Hiroshi Ito

Kazuya Kitada

Tomohiro Sakai

Yasuaki Hamada

Takayuki Yonemura

Satoshi Kimura

Akio Ito

Tsuneo Handa

Chikara Kojima

Tomoaki Nakamura

Koichi Morozumi

Jiro Tsuruno

Tomokazu Kobayashi

Yasuhiro Itayama

Masayoshi Yamada

Toshiaki Takahashi

Xiaoxing Wang

A piezoelectric element includes a first electrode disposed at a base body, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode. The piezoelectric layer includes a first piezoelectric layer containing a complex oxide having a perovskite structure that contains lead, zirconium, and titanium and a second piezoelectric layer containing a complex oxide having a perovskite structure that is denoted by formula (1) below. The first piezoelectric layer is disposed between the first electrode and the second piezoelectric layer and is preferentially oriented to (100) when the crystal structure of the first piezoelectric layer is assumed to be pseudo-cubic,Pb(Mg,Nb)O-PbZrO-PbTiO&#x2003;&#x2003;(1)where in formula (1), 0&#x3c;x,y,z&#x3c;1 and x+y+z=1.

Piezoelectric element, liquid ejecting head, and printer

A piezoelectric element has a diaphragm, a first electrode on the diaphragm, a piezoelectric layer on the first electrode, and a second electrode on the piezoelectric layer. The piezoelectric layer is a stack of multiple piezoelectric films and is made of a perovskite composite oxide containing lead, zirconium, and titanium and represented by the general formula ABO, with the molar ratio of the A-site to the B-site (A/B) in the perovskite composite oxide being 1.14 or more and 1.22 or less. In current-time curve measurement, the activation energy calculated from relaxation current using an Arrhenius plot is 0.6 [eV] or less. The relaxation current is the amount of current at the time at which a downward trend in current turns upward.

Piezoelectric element and piezoelectric element-based device

A piezoelectric element includes a first electrode; a second electrode; and a piezoelectric layer arranged between the first electrode and the second electrode, in which the piezoelectric layer is a thin film that includes a perovskite-type composite oxide which includes potassium, sodium, and niobium and which is preferentially oriented in the (100) plane, and a crystal structure of the perovskite-type composite oxide includes a basic lattice structure having an oxygen octahedron and a super lattice structure in which the oxygen octahedron is tilted.

Piezoelectric element and piezoelectric element application device

A piezoelectric material contains: a first component which is a rhombohedral crystal in a single composition, has a Curie temperature Tc1, and is a lead-free-system composite oxide having a perovskite-type structure; a second component which is a crystal other than the rhombohedral crystal in a single composition, has a Curie temperature Tc2&#x3c;Tc1, and is a lead-free-system composite oxide having a perovskite-type structure; and a third component which is a crystal other than the rhombohedral crystal in a single composition similar to the second component, has a Curie temperature Tc3&#x2265;Tc1, and is a lead-free-system composite oxide that has a perovskite-type structure and is different from the second component. When a molar ratio of the third component to the sum of the second component and the third component is &#x3b1; and &#x3b1;&#xd7;Tc3+(1&#x2212;&#x3b1;)&#xd7;Tc2 is Tc4, |Tc4&#x2212;Tc2|&#x2264;50&#xb0; C.

Piezoelectric material, method of manufacturing the same, piezoelectric element, and piezoelectric element application device

A liquid detecting apparatus includes an ultrasonic sensor that transmits and receives an ultrasonic wave, and includes a piezoelectric layer which is formed of a thin film and an ultrasonic element which is provided with a first electrode and a second electrode to interpose the piezoelectric layer between the first electrode and the second electrode, on a diaphragm which is disposed on a substrate having a cavity, and a flow path that forms the same liquid level as a liquid level of a liquid which is stored in a container, in which an acoustic matching layer and a detection surface of a surface of a lens, which are disposed on a side of the ultrasonic sensor that transmits and receives the ultrasonic wave, are disposed to be in contact with the liquid within the flow path.

Liquid detecting apparatus and liquid container

A piezoelectric element includes a first and a second electrode, a piezoelectric layer between the first electrode and the second electrode, and an orientation control layer between the first electrode and the piezoelectric layer. The orientation control layer contains perovskite complex oxide containing potassium, sodium, calcium, and niobium and preferentially oriented in the (100) plane.

Piezoelectric element and device including the same

A piezoelectric element includes a first electrode, a piezoelectric layer which is formed on the first electrode by using a solution method, and is formed from compound oxide which has a perovskite structure in which potassium, sodium, and niobium are provided, and a second electrode which is provided on the piezoelectric layer. The piezoelectric layer has a peak derived from a (200) plane and a peak derived from a (002) plane in an X-ray diffraction pattern obtained by &#x3b8;-2&#x3b8; measurement.

Piezoelectric element and piezoelectric element applied device

There is provided a piezoelectric element which includes a first electrode, a piezoelectric layer which is formed on the first electrode by using a solution method, and is formed from a compound oxide having a perovskite structure in which potassium, sodium, and niobium are provided, and a second electrode which is provided on the piezoelectric layer. A cross-sectional SEM image of the piezoelectric layer is captured at a magnification of 100,000. When evaluation is performed under a condition in which a measured value in a transverse direction is set to 1,273 nm, two or more voids are included in the piezoelectric layer, a difference between the maximum value and the minimum value among diameters of the voids to be largest in a film thickness direction is equal to or smaller than 14 nm, and the maximum value is equal to or smaller than 24 nm.

A piezoelectric material is expressed as a mixed crystal including a complex oxide having a perovskite structure and a rhombohedral structure and a complex oxide having a perovskite structure and a tetragonal structure, and the molar ratio of the complex oxide having a rhombohedral structure to the complex oxide having a tetragonal structure (rhombohedral crystal/tetragonal crystal) is 0.54 to less than 1.20.

Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and ultrasonic measuring apparatus

A piezoelectric element including a first electrode, a piezoelectric body layer, and a second electrode, in which a seed layer, which performs control such that the piezoelectric body layeris preferentially oriented with respect to a specific crystal plane, is formed between the first electrodeand the piezoelectric body layer, and the seed layeris formed from a composite oxide with a perovskite structure that includes at least Bi, Sr, Fe and Ti and an element ratio of Bi, Sr, Fe, and Ti in the seed layer satisfies the Formula (1) below.Bi:Sr:Fe:Ti=&#xb7;(1&#x2212;)::1&#x2212;&#x2003;&#x2003;(1)

A piezoelectric material contains a first component that is a rhombohedral crystal and that is configured to have a complex oxide with a perovskite structure and Curie temperature Tc1, a second component that is a crystal other than a rhombohedral crystal and that is configured to have a complex oxide with a perovskite structure and Curie temperature e Tc2, and a third component that is a rhombohedral crystal and that is configured to have a complex oxide with a perovskite structure and Curie temperature Tc3 different from the first component, and in which Tc2 is higher than Tc1, Tc3 is equal to or higher than Tc2, and a value of (0.1&#xd7;Tc1+0.9&#xd7;Tc2) is equal to or lower than 280&#xb0; C.

Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generator

A piezoelectric material contains a first component that is a rhombohedral crystal that is configured to have a complex oxide with a perovskite structure and Curie temperature Tc1, a second component that is a crystal other than a rhombohedral crystal that is configured to have a complex oxide with the perovskite structure and Curie temperature Tc2, and a third component that is configured to have a complex oxide with the perovskite structure in which the component is formed as the same crystal system as the second component and Curie temperature Tc3, in which Tc1 is higher than Tc2, and Tc3 is equal to or higher than Tc1.

A piezoelectric material contains a first component that is a rhombohedral crystal that is configured to have a complex oxide with a perovskite structure and Curie temperature Tc1 and a second component that is a crystal other than a rhombohedral crystal that is configured to have a complex oxide with the perovskite structure and Curie temperature Tc2, in which |Tc1&#x2212;Tc2| is equal to or less than 50&#xb0; C.

A liquid ejecting head including a piezoelectric element, the piezoelectric element includes: a first electrode; an orientation control layer provided on the first electrode, the orientation control layer having a perovskite structure including Bi in an A site and Fe and Ti in a B site, and the orientation control layer being self-oriented in a (100) plane; a piezoelectric body layer provided on the orientation control layer and made of a piezoelectric material of the perovskite structure preferentially oriented in the (100) plane; and a second electrode provided on the piezoelectric body layer.

Liquid ejecting head, liquid ejecting apparatus, piezoelectric element and sensor

A liquid ejecting head comprises a pressure-generating chamber communicating with a nozzle opening and a piezoelectric element including a piezoelectric layer and electrodes. The piezoelectric layer is composed of a compound oxide having a perovskite structure and containing bismuth, ferrate, manganese, potassium and titanium.

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Shiojiri, Japan

Tetsuya Isshiki