Kanagawa Academy of Science and Technology

Toyoda Gosei Co., Ltd.

Tetsuya Hasegawa

Taro Hitosugi

Miki Moriyama

Yutaka Furubayashi

Junpei Kasai

Koichi Goshonoo

Yasushi Hirose

When a p-layercomposed of GaN is maintained at ordinary temperature and TNO is sputtered thereon by an RF magnetron sputtering method, a laminated TNO layeris in an amorphous state. Then, there is included a step of thermally treating the amorphous TNO layer in a reduced-pressure atmosphere where hydrogen gas is substantially absent to thereby crystallize the TNO layer. At the sputtering, an inert gas is passed through together with oxygen gas, and volume % of the oxygen gas contained in the gas passed through is 0.10 to 0.15%. In this regard, oxygen partial pressure is 5&#xd7;10Pa or lower. The temperature of the thermal treatment is 500&#xb0; C. for about 1 hour.

Method for producing transparent conductive layer comprising TIO2 and method for producing semiconductor light-emitting element utilizing said method for producing transparent conductive layer

There have been demands for transparent electrode materials and magnetic materials, each having a wide range of applications. In view of the situations, a novel functional device and a method for forming an oxide material are provided. A functional device includes an AlGaInN layer (wherein 0&#x2266;x&#x2266;1, 0&#x2266;y&#x2266;1, and 0&#x2266;z&#x2266;1) and an oxide material layer composed of a metal oxide and formed on the AlGaInN layer. The metal oxide may be TiO. The present invention provides a functional device that includes a group III nitride layer having excellent physical and chemical properties and a film integrally formed thereon. The film reflects less light at the interface and has chemical resistance and high durability.

Internal gear pump

With regard to a substrate for a transparent electrode and transparent conductive thin film each having transparency and conductivity, a transparent metal material and transparent electrode are provided which are capable of being stably supplied and are composed of raw materials with superior chemical resistance. When a metal oxide layer () composed of an anatase type crystal structure is provided on a substrate () to constitute the metal oxide layer () by M:TiO, low resistivity is achieved while internal transmittance is maintained. M:TiOobtained by substituting other atoms (Nb, Ta, Mo, As, Sb, or W) for Ti of the anatase type TiOenable maintenance of transparency and remarkably improvement of electric conductivity.

Transparent conductor, transparent electrode, solar cell, light emitting device and display panel

Growing community of inventors

Tokorozawa, Japan

Tetsuya Hasegawa