Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kanto Denka Kogyo Co., Ltd. (2 from 76 patents)
2 patents:
1. 10629449 - Gas composition for dry etching and dry etching method
2. 10431472 - Gas composition for dry etching and dry etching method