Japan Fine Ceramics Center

Shinko Electric Industries Co., Ltd.

Ihi Corporation

Yokohama National University

Nippon Tungsten Co., Ltd.

Trek Holding Co., Ltd.

Tetsushi Matsuda

Takeshi Nakamura

Norio Shiraiwa

Ken Goto

Mitsuyoshi Nagano

Satoshi Kitaoka

Koki Tamagawa

Toshio Uehara

Tadayoshi Yoshikawa

Miki Saito

Hideaki Matsubara

Kouta Tsutsumi

Akihiko Ito

Masahiro Kotani

Daisaku Yokoe

A high-temperature-steam-oxidation-resistive coated reinforcement fiber applicable to a fiber reinforced composite, is provided with: a reinforcement fiber; a coating layer covering the reinforcement fiber and including a rare-earth silicate; an exfoliative layer intervening in an interface between the coating layer and the reinforcement fiber; and a supplemental coating layer covering the reinforcement fiber, the exfoliative layer and the coating layer.

Environment-resistive coated reinforcement fiber applicable to fiber-reinforced composite

A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 10to 10(&#x3a9;&#xb7;cm) necessary for a Johnsen-Rahbek type electrostatic chuck.

Dielectric layer for electrostatic chuck and electrostatic chuck

Growing community of inventors

Aichi, Japan

Tetsushi Matsuda