Ebara Corporation

Ckd Corporation

Ebara Field Tech. Corporation

Tetsuro Sugiura

Takashi Kyotani

Toshiharu Nakazawa

Keiichi Ishikawa

Kohtaro Kawamura

Yasuhiko Suzuki

Toyoji Shinohara

Seiji Kashiwagi

Hideo Arai

Nobuharu Noji

Tetsuo Komai

Norihiko Nomura

Shinichi Sekiguchi

Toru Osuga

Takanori Inada

Atsushi Shiokawa

Kazuma Ito

Koichi Kido

Hiroki Furuta

Yuji Matsuoka

Keiji Maishigi

Kazuyuki Tatsuta

Norio Kimura

Keiji Tanaka

Masahiro Hatakeyama

Katsuaki Usui

Hiroaki Ogamino

Tomoyuki Yamazaki

Takashi Hozumi

Yasuhiro Niimura

Atsushi Oyama

Koichi Iwasaki

Hiroshi Hattori

Chikako Honma

Jie Yuan Lin

Yasuto Niina

An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product produced within a target vacuum pump, including:

Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method

A control device that controls a target vacuum pump including a motor, including: a decision unit that decides, using at least one of target state quantities at a time of a past stop process of the target vacuum pump or another vacuum pump wherein the target state quantities are state quantities which fluctuate in accordance with a load at a time of a process of stopping a vacuum pump, a normal fluctuation range or a normal time fluctuation behavior of the target state quantity at the time of the stop process; and a control unit that controls the motor, wherein the control unit compares the target state quantity at the time of the process of stopping the target vacuum pump with the normal fluctuation range or the normal time fluctuation behavior, and changes a method of controlling the motor during the stop process depending on the comparison result.

Control device, control system, control method, recording medium and machine learning device

A detoxifying devicehaving an inner wallthat forms a flow passagethrough which treatment gas flows includes a first pipingthat forms a part of the flow passage, a replaceable piping sectionthat forms a part of the flow passageat the position downstream of the first piping, and is connected thereto for sprinkling the cleaning water to remove the solid product adhering to the inner wall, and a second pipingthat forms a part of the flow passageat the position downstream of the piping section, and is connected thereto.

Detoxifying device, method of replacing piping section of detoxifying device, and method of cleaning piping of detoxifying device

The present invention relates to a vacuum evacuation system used to evacuate a processing gas from one or more process chambers for use in, for example, a semiconductor-device manufacturing apparatus. The vacuum evacuation system is a vacuum apparatus for evacuating a gas from a plurality of process chambers (). The vacuum evacuation system includes a plurality of first vacuum pumps () coupled to the plurality of process chambers () respectively, a collecting pipe () coupled to the plurality of first vacuum pumps (), and a second vacuum pump () coupled to the collecting pipe ().

Vacuum evacuation system

A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.

Vacuum pump with abatement function

A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas.

The fan scrubber is provided with a casing having a gas draw-in port and a gas ejection port, a fan disposed in the casing, a nozzle from which a liquid is jetted into the casing, and a canned motor connected to the fan. The canned motor has a main shaft connected to the fan, a rotor which rotates integrally with the main shaft, a stator disposed on the periphery of the rotor, a motor casing in which the rotor and the stator are housed, and a can which partitions the interior of the motor casing into a rotor chamber in which the rotor is disposed and a stator chamber in which the stator is disposed.

Fan scrubber and vacuum pump apparatus

A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.

A vacuum pump has a discharge port coupled to an abatement chamber for treating an exhaust gas discharged from a chamber of a manufacturing apparatus to make the exhaust gas harmless. The vacuum pump is coupled to a heat exchanger configured to heat an inert gas by using heat generated when the exhaust gas is treated to be made harmless in the abatement part. The inert gas heated by the heat exchanger is introduced into the vacuum pump.

Exhaust gas abatement apparatus

There are provided a vacuum pump self-diagnosis method, a vacuum pump self-diagnosis system, a vacuum pump central monitoring system capable of making self-diagnosis of a dry vacuum pump. A vacuum pump self-diagnosis method decides the occurrence of failure and generates an alarm when a predetermined alarm set value is exceeded by an integrated value or an average value of a current of a motor for rotating a rotor of said vacuum pump. In a vacuum pump self-diagnosis system for making self-diagnosis of a vacuum pump which comprises a casing and a rotor rotatably arranged in the casing for sucking and discharging a gas through rotations of the rotor, the rotor comprises a plurality of stages and a pressure sensor is provided between the rotor stages. A self-diagnosis unit is provided for calculating an integrated value or an average value of a current of a motor for rotating said rotor, and making self-diagnosis of the vacuum pump when the integrated value or average value exceeds a predetermined alarm set value. The self-diagnosis unit switches from one self-diagnosis calculation method to another or interrupts the self-diagnosis calculation based on a pressure value detected by said pressure sensor.

Vacuum pump self-diagnosis method, vacuum pump self-diagnosis system, and vacuum pump central monitoring system

A highly reliable combined bearing capable of achieving equal and sufficient lubrication of a plurality of roller bearings with a simple and compact structure is provided. The combined bearing includes a first roller bearing and a second roller bearing which are in contact with each other and arranged on the same axis. A lubricating oil inlet introduces a lubricating oil into an inner space formed between the first roller bearing and the second roller bearing, the lubricating-oil inlet being provided on at least one of an outer ring of the first rolling bearing and an outer ring of the second rolling bearing.

Combined bearing and rotary machine

Unit bearing

To provide an operation control device for a vacuum pump and a method for stopping the operation of the vacuum pump that make it possible to effectively remove products, resulting from solidification and liquefaction of gas in a casing and possibly hindering the rotation of a pump rotor, so that the vacuum pump may be started normally. An operation control devicefor a vacuum pump having a pump rotordisposed in a casingfor free rotation includes a pump rotor control sectionfor controlling the rotation of the pump rotor. The pump rotor control sectionhas a function to, after a pump stop action has been taken, rotate the pump rotorin forward and/or reverse directions according to a predetermined timing pattern and then stop the pump rotor

Operation control device for vacuum pump and method for stopping operation thereof

An evacuation system having a long service life, a compact configuration and high reliability is disclosed. The system enables the process gases to be reused, so that the overall costs of capital investment and operation are reduced. The system comprises a processing chamber, and a vacuum pump communicating with the processing chamber by way of an evacuation conduit for evacuating the processing chamber. The evacuation conduit are provided with not less than two trapping devices arranged in series and operating at different temperatures for capturing different components contained in an exhaust gas discharged from the processing chamber.

Growing community of inventors

Tokyo, Japan

Tetsuro Sugiura