L'air Liquide,societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude

Tetsuro Shigeno

Toshiyuki Nakagawa

Naoyuki Nakamoto

Masaaki Muro

Masahiro Kimoto

Takamitsu Shigemoto

Yoshio Uetake

Disclosed are methods and apparatuses for supplying a liquid and controlling its level inside of a container. In particular, the liquid inside of the container may be a liquid material suitable for use in a chemical vapor deposition process, wherein the liquid is controlled and supplied in a manner which minimizes the introduction of impurities.

Device for supplying the liquid material inside a filling container and method of controlling the liquid level inside the filling container for said liquid material supply device

The present invention is aimed at providing a method for simply measuring the liquid quantity of liquid material in a receptacle. A liquid quantity measuring apparatus for use in a liquid material supplying system comprising a receptacle for storing liquid material, a first pipe for feeding feeder gas into said receptacle, a first shutoff valve provided in said first pipe, a second shutoff valve provided in said first pipe downstream of said first shutoff valve and a second pipe for supplying the liquid material from said receptacle to supplier's destinations, and for measuring the liquid quantity of the liquid material in said receptacle, the measuring apparatus comprising: &#x2014;a first pressure detection means for detecting the pressure of feeder gas in said pipe between said first shutoff valve and said second shutoff valve; &#x2014;a second pressure detection means for detecting the pressure of gas in said receptacle; and &#x2014;an arithmetic processing means for seeking by arithmetic calculation the liquid quantity of the liquid material in said receptacle on the basis of the detection results of said first pressure detection means and said second pressure detection means.

Liquid quantity measuring apparatus, liquid quantity measuring method and method for supplying quantitively supplying liquid material

Growing community of inventors

Itami, Japan

Tetsuro Shigeno