Smc Kabushiki Kaisha

Tetsuro Maruyama

Yoshihiro Fukano

Tadashi Uchino

Akio Sato

Yuji Tsuda

Masaaki Ono

Yuzuru Okita

An insert section of an insert member is inserted into a tube member in a state in which the insert member is detached from a recess to form a diametrally expanded section on the tube member. Subsequently, the insert member is fitted to the recess to install the tube member to the recess. At this stage, an outer circumferential surface of an expanded section of the insert member tightly contacts with an inner circumferential surface of the recess to effect the sealing function. Subsequently, a tapered section and an outer circumferential surface of the tube member are resin-welded by using a welding material. Thus, the tube member is prevented from disengagement from a body.

Tube connection structure of fluid pressure-operated apparatus

When an insert member is inserted into a fluid passage of a fluid tube, the fluid tube is diametrically enlarged by a tapered section. When a female thread of a nut member is meshed with a male thread of a main body section, first and second edge sections are engaged so that they bite into the outer circumference of the fluid tube diametrally enlarged by the tapered section. Accordingly, various fluid tubes, which are identical in outer diameter size but which are slightly different in wall thickness, are reliably prevented from disengagement from a tube joint.

Tube joint having tightening member for accommodating tubes of varying wall thickness

A tube joint is described which facilitates the connection of tubes having different internal diameters or calibers, simply by exchanging a nut member, an insert bush and a collar member for another nut member, another insert bush and another collar member, respectively, having sizes which are suitable for the tube which is to be connected to the tube joint, and in a state in which the joint body is connected to a fluid pressure apparatus.

Tube joint

A suck back valve comprises an ON/OFF valve, a suck back mechanism, a first sensor for detecting a displacement amount of a first diaphragm of the ON/OFF valve, and a second sensor for detecting a displacement amount of a second diaphragm corresponding to a suction amount of a coating liquid. The suck back valve further comprises a control unit for feedback-controlling the valve displacement speed of the ON/OFF valve and the suction amount of the coating liquid on the basis of detection signals obtained by the first sensor and the second sensor respectively.

Suck back valve having sensor for detecting diaphragm displacement amount

A suck back valve is equipped with a coupling having a fluid passage with a first port formed in one end, and a second port formed in another end thereof, a suck back mechanism for sucking a pressurized fluid inside the fluid passage under a displacement action of a second diaphragm which is displaced by a pilot pressure, and an ON/OFF valve disposed coaxially with the second diaphragm for opening and closing the fluid passage by displacement and movement thereof with the second diaphragm.

Suck back valve

A tube joint includes a joint body having a through hole to serve as a fluid passage provided along a direction of an axis, a nut member for connecting a tube to the joint body, and an insert bush inserted and fitted to an opening of the joint body and having an insert section to be inserted into the tube and an expanded section protruding from one end of the tube. The expanded section is formed with first projections which make linear contact with an inner wall surface of the opening and which function as seals.

A suck back valve comprises a valve body including a fluid passage having a first port formed at one end and a second port formed at the other end, and an air supply port for introducing a pressurized fluid; a displacement mechanism provided displaceably at the inside of the valve body, for making displacement in accordance with an action of the pressurized fluid introduced from the air port; a first diaphragm coupled to the displacement mechanism, for making displacement integrally with the displacement mechanism; and a seat section provided to face to the fluid passage, for seating the first diaphragm or making separation from the first diaphragm.

Suck back valve having diaphragm with thick walled section

A suck back valve in which the response speed of a diaphragm is improved and in which control becomes assured, wherein there is no concern of changes occurring in an amount of sucked fluid, and wherein a system employing the suck back valve is kept small in scale, thereby enabling ease of installation.

Electric linear voice coil actuated suck back valve

A suck back valve includes a fitting having a fluid passage formed with a first port at one end thereof and a second port at another end, a valve actuator having a suck back mechanism for sucking a fluid from inside the fluid passage according to a negative pressure action of a diaphragm displaced by a pilot pressure, and first and second electromagnetic valves which increase/reduce the pilot pressure supplied to a diaphragm chamber in accordance with supply and discharge actions. A controller is provided for energizing and deenergizing the first and second electromagnetic valves, wherein said fitting, said actuator and said controller are assembled together as an integral unit.

A pipe joint has a body having a through hole defined axially therein as a fluid passage, a nut threaded on the joint body thereby connecting the pipe to the joint body, and a sleeve held against a bottom of a hole defined in the joint body by an annular step surface and having a bulging portion slanting at a predetermined angle. The nut has a radially inner pipe presser which is bent and flexed into a shape complementary to the bulging portion when the nut is progressively threaded over the joint body, for pressing an end of the pipe against the sleeve under a resilient force tending to return the radially inner pipe presser to an original shape thereof.

Pipe joint

A suck back valve is proposed, comprising a suck back mechanism for sucking a coating liquid inside a fluid passage under a negative pressure action of a diaphragm displaced by a pilot pressure, an ON/OFF valve for opening and closing the fluid passage under action of the pilot pressure, and a flow amount control device for controlling the pilot pressure supplied to the ON/OFF valve.

A suck back valve is proposed, comprising a suck back mechanism for sucking a coating liquid inside a fluid passage under a negative pressure action of a third diaphragm displaced by a pilot pressure, an ON/OFF valve for opening and closing the fluid passage under action of the same pilot pressure which is supplied to the suck back mechanism, and a fluid passage switching element for switching the pilot pressure supplied respectively to the suck back mechanism and to the ON/OFF valve.

A suck back valve is proposed which prevents displacement of a diaphragm due to pressure of a supply fluid, together with alleviating concern of changes in the amount of supply fluid which is to be sucked, and enabling ease of installation by making compact the system which employs the suck back valve. A diaphragm is displaced in the direction of arrow A under an activation operation of a linear voice coil type luffing device. Compressed air is introduced into a chamber, wherein the diaphragm is supported under an applied pressure. A coating liquid which is introduced through a fluid passage is supplied onto a semiconductor wafer from a nozzle. When an ON/OFF valve is activated and supply of the coating liquid is prevented, together with activating the linear voice coil luffing device and causing displacement of a plunger in the direction of arrow B, a poppet valve is displaced so that compressed air inside the chamber is output from a fluid output passage. Upon further displacement of the plunger the diaphragm is displaced, whereby the coating liquid is sucked, and any coating liquid in the nozzle is returned in the direction of arrow D.

A two-way valve has a poppet valve displaceably disposed in a bonnet for selectively opening and closing a communication passage between primary and secondary ports, and a resilient member disposed in a diaphragm chamber defined between the bonnet and the poppet valve and resiliently deformable for dampening a load applied to a diaphragm of the poppet valve which is exposed to the communication passage.

Growing community of inventors

Ibaraki-ken, Japan

Tetsuro Maruyama