Canon Kabushiki Kaisha

Other

Tokyo Institute of Technology

Oriental Photo Industrial Co., Ltd.

Kiyotaka Wasa

Wasa, Kiyotaka

Funakubo, Hiroshi

Tetsuro Fukui

Kenichi Takeda

Takanori Matsuda

Toshihiro Ifuku

Masato Katayama

Masao Suzuki

Akihiro Mouri

Kazuo Isaka

Hiroshi Funakubo

Katsumi Aoki

Takeshi Miyazaki

Yoshio Takasu

Motokazu Kobayashi

Hiroshi Fukumoto

Hiroyuki Sugata

Takao Yonehara

Kazunori Ueno

Tadashi Okamoto

Takeshi Ikeda

Toshikazu Ohnishi

Yoshinobu Baba

Hitoshi Itabashi

Makoto Kubota

Tatsuo Furuta

Naosato Taniguchi

Miki Tamura

Koji Suzuki

Chieko Mihara

Norio Ohkuma

Yoko Yoshinaga

Tetsuro Kuwayama

Tetsuya Higuchi

Yomishi Toshida

Kazuo Yoshinaga

Hideaki Mitsutake

Tadashi Sato

Yuji Kondo

Jumpei Hayashi

Noboru Koumura

Masataka Kawahara

Hiroshi Saito

Kenji Kagami

Akira Unno

Kyo Miura

Hiroshi Aoto

Katsuya Nishino

Kozo Arahara

Kazumi Tanaka

Shintaro Yokoyama

Takehiko Ooi

Yasukazu Ayaki

Tsuyoshi Santo

Yoshihiro Oguchi

Tsuyoshi Santoh

Hiromi Tanaka

Akio Ikesue

Shoji Okamoto

Susumu Nakamura

Toshiaki Majima

Yutaka Kagawa

Hiroshi Nakaki

Ken Nishida

Masaru Shimizu

Risako Ueno

Nobuko Yamamoto

Yoshinobu Shiraiwa

Hideki Anayama

Kaoru Miura

Fumitaka Kan

Katsuya Oikawa

Takakazu Tanaka

Hidetoshi Hirano

Shoji Kikuchi

Kohzoh Arahara

Toshikazu Onishi

Shinsuke Takeuchi

Shintaro Yasui

Yayoi Nagao

Yong Kwan Kim

Takehiko Ohi

Rikyu Ikariyama

Yoshhiro Oguchi

Kobayashi Motokazu

Masato Kotayama

Hiromi Ueda

Takashi Katoda

Goji Asano

Osami Sakata

A piezoelectric ceramic that includes barium titanate and 0.04 mass % or more and 0.20 mass % or less manganese relative to barium titanate. The piezoelectric ceramic is composed of crystal grains. The crystal grains include crystal grains A having an equivalent circular diameter of 30 &#x3bc;m or more and 300 &#x3bc;m or less and crystal grains B having an equivalent circular diameter of 0.5 &#x3bc;m or more and 3 &#x3bc;m or less. The crystal grains A and the crystal grains B individually form aggregates and the aggregates of the crystal grains A and the aggregates of the crystal grains B form a sea-island structure.

Piezoelectric ceramic, method for making the same, piezoelectric element, liquid discharge head, and ultrasonic motor

The present invention provides a piezoelectric material which can be applied even to the MEMS technique, exhibits satisfactory piezoelectricity even at high ambient temperatures and is environmentally clean, namely, a piezoelectric material including an oxide obtained by forming a solid solution composed of two perovskite oxides A(1)B(1)Oand A(2)B(2)Odifferent from each other in crystalline phase, the oxide being represented by the following general formula (1):X{A(1)B(1)O}&#x2212;(1&#x2212;X){A(2)B(2)O}&#x2003;&#x2003;(1)wherein 'A(1)' and 'A(2)' are each an element including an alkali earth metal and may be the same or different from each other; &#x201c;B(1)&#x201d; and &#x201c;B(2)&#x201d; each include two or more metal elements, and either one of &#x201c;B(1)&#x201d; and &#x201c;B(2)&#x201d; contains Cu in a content of 3 atm % or more; and &#x201c;X&#x201d; satisfies the relation 0&#x3c;X&#x3c;1.

Piezoelectric material

There are disclosed an epitaxial film, comprising: heating an Si substrate provided with an SiOlayer with a film thickness of 1.0 nm or more to 10 nm or less on a surface of the substrate; and forming on the SiOlayer by use of a metal target represented by the following composition formula:yA(1&#x2212;y)B&#x2003;&#x2003;(1),in which A is one or more elements selected from the group consisting of rare earth elements including Y and Sc, B is Zr, and y is a numeric value of 0.03 or more to 0.20 or less, the epitaxial film represented by the following composition formula:xAO&#x2212;(1&#x2212;x)BO&#x2003;&#x2003;(2),in which A and B are respectively same elements as A and B of the composition formula (1), and x is a numeric value of 0.010 or more to 0.035 or less.

Epitaxial film, piezoelectric element, ferroelectric element, manufacturing methods of the same, and liquid discharge head

A perovskite type oxide of a single crystal structure or a uniaxial-oriented crystal structure is represented by ABO. Site A includes Pb as a main component and site B includes a plurality of elements. The perovskite type oxide includes a plurality of crystal phases selected from the group consisting of tetragonal, rhombohedral, orthorhombic, cubic, pseudo-cubic and monoclinic systems and the plurality of crystal phases are oriented in the direction of &#x3c;100&#x3e;.

Perovskite type oxide material, piezoelectric element, liquid discharge head and liquid discharge apparatus using the same, and method of producing perovskite type oxide material

The present invention provides a piezoelectric element and having a piezoelectric body and a pair of electrodes being contact with the piezoelectric body, wherein the piezoelectric body consists of an ABOperovskite oxide in which an A-site atom consists of Bi and a B-site atom is composed of an atom of at least two types of elements.

Piezoelectric body and liquid discharge head

The piezoelectric actuator includes a piezoelectric film between two electrode layers and a diaphragm. Assuming that: each elastic coefficient of all materials is isotropic and a distortion amount of the piezoelectric film by an electric field is isotropic in all in-plane directions; a point located on a diaphragm surface and having a maximum displacement when a predetermined electric field is applied to distort the piezoelectric film, is expressed by P&#x3b4;; and a point located on a circumference of a reference-circle having P&#x3b4;as a center and having a minimum difference in displacement from P&#x3b4;is expressed by P&#x3b4;, the diaphragm has a shape capable of determining an axis Aset in a straight-line joining P&#x3b4;and P&#x3b4;, the diaphragm comprises a single-crystalline-material in which a plane orthogonal to Aand perpendicular to an axis Aon the diaphragm surface, is a {110}-plane, and the piezoelectric film is a {100}-single-orientation film.

Piezoelectric actuator and liquid discharge head using the same

A piezoelectric element comprises a piezoelectric body including a film made of an ABOperovskite oxide crystal epitaxially grown above a substrate, and a pair of electrode layers provided to the piezoelectric body, wherein the piezoelectric body has a porous region on a side opposite to a side of the substrate.

Piezoelectric element, manufacturing method for piezoelectric body, and liquid jet head

A piezoelectric substance which is made of oxide with perovskite type structure which is made of ABO, where a principal component of A is Pb, and principal components of B contain at least two kinds of elements among Nb, Mg, Zn, Sc, Cd, Ni, Mn, Co, Yb, In, and Fe, and Ti, characterized by being a uniaxial orientation crystal or a single crystal which has an a-domain and a c-domain of tetragonal.

Piezoelectric substance, piezoelectric element, and liquid discharge head and liquid discharge apparatus using piezoelectric element

The present invention provides a dielectric film structure having a substrate and a dielectric film provided on the substrate and in which the dielectric film has (001) face orientation with respect to the substrate, and in which a value u in the following equation (1) regarding the dielectric film is a real number greater than 2:=()&#xd7;()&#x2003;&#x2003;(1)where, Cis a count number of a peak of a (001') face of the dielectric film in an Out-of-plane X ray diffraction measurement (here, 1&#x2032; is a natural number selected so that Cbecomes maximum); Cis a count number of a peak of a (h&#x2032;00) face of the dielectric film in an In-plane X ray diffraction measurement (here, h&#x2032; is a natural number selected so that Cbecomes maximum); Wis a half-value width of a peak of the (001&#x2032;) face of the dielectric film in an Out-of-plane rocking curve X ray diffraction measurement; and Wis a half-value width of a peak of the (h&#x2032;00) face of the dielectric film in an In-plane rocking curve X ray diffraction measurement.

Dielectric film structure, piezoelectric actuator using dielectric element film structure and ink jet head

A piezoelectric substance element has a piezoelectric substance film and a pair of electrodes connected to the piezoelectric substance film on a substrate, and a main component of the piezoelectric substance film is Pb(Zr, Ti)O, a composition ratio of Zr/(Zr+Ti) is over 0.4 but less than 0.7, the piezoelectric substance film is a film having at last a tetragonal crystal a-domain and a c-domain within a range of &#xb1;10&#xb0; with respect to the surface of the substrate, and a volume rate of the c-domain to the total of the a-domain and the c-domain is equal to or larger than 20% and equal to or smaller than 60%.

Piezoelectric substance element, piezoelectric substance film manufacturing method, liquid discharge head and liquid discharge apparatus

An optical element satisfactory in transparency and characteristics as an optical modulation element, and a piezoelectric substance element satisfactory in precision and reproducibility as a fine element such as MEMS can be provided. The piezoelectric substance element includes, on a substrate, at least a first electrode, a piezoelectric substance film and a second electrode. The piezoelectric substance film does not contain a layer-structured boundary plane; the crystal phase constituting the piezoelectric substance film comprises at least two of a tetragonal, a rhombohedral, a pseudocubic, an orthorhombic and a monoclinic; and the piezoelectric substance film includes, in a portion in which a change in the composition is within a range of &#xb1;2%, a portion where a proportion of the different crystal phases changes gradually in a thickness direction of the film.

Piezoelectric substance element, liquid discharge head utilizing the same and optical element

BaTiO&#x2014;PbTiOseries single crystal is single-crystallized by heating BaTiO&#x2014;PbTiOcompact powder member or sintered member having a smaller Pb-containing mol number than Ba-containing mol number, while keeping the powder or substance in non-molten condition. In this way, this single crystal can be manufactured at a crystal growing speed faster still and stabilized more, significantly contributing to improving the dielectric loss and electromechanical coupling coefficient for the provision of excellent BaTiO&#x2014;PbTiOseries single crystal in various properties, as well as for the provision of piezoelectric material having a small ratio of lead content, which is particularly excellent in piezoelectric property and productivity.

[object Object]

There is disclosed a piezoelectric element having, on a substrate, a piezoelectric body and a pair of electrodes which come in contact with the piezoelectric body, wherein the piezoelectric body consists of a perovskite type oxide represented by the following formula (1):(Bi,Ba)(M,Ti)O&#x2003;&#x2003;(1)in which M is an atom of one element selected from the group consisting of Mn, Cr, Cu, Sc, In, Ga, Yb, Al, Mg, Zn, Co, Zr, Sn, Nb, Ta and W, or a combination of the atoms of the plurality of elements.

Piezoelectric element containing perovskite type oxide, and liquid jet head and ultrasonic motor using the piezoelectric element

The invention provides a piezoelectric film having a large piezoelectric property, and a piezoelectric element, a liquid discharge head and a liquid discharge apparatus utilizing the same. The piezoelectric film is formed by an epitaxial oxide of &#x3c;100&#x3e; orientation having at least a tetragonal crystal structure, in which the oxide is a perovskite type composite oxide represented by a general formula ABOand contains at least domains C, D and E of [100] orientation having mutual deviation in crystal direction, where the angular deviation between [100] directions in domains C and D, in domains D and E, in domains C and E and in domains D and E are respectively 5&#xb0; or less, 5&#xb0; or less, 0.3&#xb0; or less, and 0.3&#xb0; or more, and the angular deviation between [001] directions in domains C and E and in domains D and E are respectively 1.0&#xb0; or more, and 1.0&#xb0; or more.

Piezoelectric member, piezoelectric element, and liquid discharge head and liquid discharge apparatus utilizing piezoelectric element

Growing community of inventors

Yokohama, Japan

Tetsuro Fukui