Matsushita Electric Industrial Co., Ltd.

Mitsubishi Denki Kabushiki Kaisha

Tetsuo Satake

Hiroshi Yuasa

Masazumi Matsuura

Kinya Goto

Takeshi Yamashita

Hideo Hatanaka

Yasuhiro Ueyama

Susumu Matsumoto

Hideaki Komoda

Michinari Yamanaka

Keiichi Ochiai

Etsuyoshi Kobori

A hole is formed in an insulating film containing silicon and carbon. The insulating film has a density or a carbon concentration varying gradually in the direction of the thickness thereof.

Method for fabricating a dual damascene contact in an insulating film having density gradually varying in the thickness direction

After a hole is formed in a low dielectric constant film on a substrate, a protective film is formed on the wall surface of the hole or an electron acceptor is caused to be adsorbed by or implanted in the low dielectric constant film exposed at the wall surface of the hole. Otherwise, resist residue is left on the wall surface of the hole. Then, a resist pattern having an opening corresponding to a wire formation region including a region formed with the hole is formed by using a chemically amplified resist.

Method for fabricating electronic device

Electronic device includes an insulating film having density or carbon concentration varying gradually in the direction of the thickness and a conductive film formed therein

In the magnetic recording medium, the non-magnetic substrate has an under-coat layer including the first flake powder of non-magnetic material on its surface and further has a back-coat film including the second flake powder of non-magnetic material on the opposite face on the non-magnetic substrate to the one face coated by the magnetic film; thereby splendid property of running durability and electromagnetic transducing characteristics is achieved in spite of thinning the total thickness of the magnetic recording medium.

Magnetic recording medium

A magnetic field orientation for producing a magnetic recording medium is made by using plural moving magnet which are driven in a direction parallel to the running direction of a nonmagnetic base film having a magnetic layer thereon; thus the time period during which the magnetic particles in the magnetic paint coated on the nonmagnetic base receive orientation can be varied independent from coating velocity.

Method for producing magnetic recording medium

Growing community of inventors

Hyogo, Japan

Tetsuo Satake