Hitachi, Ltd.

Hamamatsu-photonics K.k.

Research Development Corporation of Japan

Tetsuji Kodama

Tsuneyuki Urakami

Hiroshi Tsuchiya

Junji Endo

Nobuyuki Osakabe

Shinji Ohsuka

An electron-microscope image viewing apparatus capable of measuring of a moving speed or a vibration frequency of an atomic structure, a magnetic structure, an electric structure or the like of a specimen even when the structure changes at a high rate. The apparatus includes a charged particle source for emitting charged particles, an illuminating electron lens system for illuminating a specimen with a beam of the charged particles, an image magnifying/projecting lens system for magnifying an image of the specimen formed by charged particles scattered upon transmission through the specimen and projecting the magnified image onto an image forming plane, at least one charged particle extracting means provided on the image forming plane of the image magnifying/projecting lens system for taking out the charged particles from a predetermined portion of the charged particle beam projected onto the image forming plane, at least one charged particle detector for detecting the charged particles taken out through the charged particle extracting means, and a signal processing means for processing a signal outputted from the charged particle detector.

Charged particle guide apparatus and image viewing apparatus for charged

Growing community of inventors

Nagoya, Japan

Tetsuji Kodama