Denso Corporation

Tetsuji Itou

Akio Iwase

Shige Kadotani

Toshio Ooshima

A method of producing a laminate-type piezoelectric element, wherein a ceramic laminated body therein is formed through an intermediate laminated body-forming step of forming an intermediate laminated bodyby alternately laminating green sheetsthat serve as the piezoelectric layers and the inner electrode layers, and a calcining step of forming the ceramic laminated body by calcining the intermediate laminated body. In the intermediate laminated body-forming step, an overlapped portionand a non-overlapped portionare formed in the intermediate laminated body, and voidsare formed, in advance, in at least part of the portion that becomes the non-overlapped portion. In the calcining step, relaxing layers including the voidsare formed.

Method of producing laminate-type piezoelectric element

A hollow laminated piezoelectric element having excellent durability and reliability and capable of obtaining a high output, and a method of manufacturing the hollow laminated piezoelectric element are provided. A hollow laminated piezoelectric elementcomprises a ceramic laminatethat is formed by having alternately laminated piezoelectric layersmade of a piezoelectric material and internal electrode layersandhaving conductivity and by having a center through holeformed to pass through the ceramic laminatealong a lamination direction. The ceramic laminatehas an internally terminated structure in the inside periphery having at least a portion of inside peripheral ends of the internal electrode layersandterminated within the ceramic laminateso that at least a portion of the inside peripheral ends of the internal electrode layersandis not exposed to the inside peripheral surfaceof the ceramic laminate. The inside peripheral surfaceof the ceramic laminatehas inside peripheral slitshaving trenches provided in the peripheral direction toward the inside of the piezoelectric layersfrom the inside peripheral surface

Hollow laminated piezoelectric element and its manufacturing method

This invention provides a stacked piezoelectric element that has excellent durability and reliability by ensuring reliable electrical conduction between internal electrode layer and conductive adhesive, and a method of fabricating such a stacked piezoelectric element, wherein the stacked piezoelectric elementcomprises: a ceramic stackconstructed by alternately stacking piezoelectric layersmade of a piezoelectric material and internal electrode layershaving electrical conductivity; and external electrodesbonded to the side facesandof the ceramic stackvia an electrically conductive adhesive. The side facesandof the ceramic stackare provided with electrode recesseseach formed by indenting a portion of the edge of each of the internal electrode layersin the stacking direction thereof thereby forming a gap between it and the overlying piezoelectric layer, and the conductive adhesiveis applied so as to enter the electrode recessesfrom the side facesandof the ceramic stack

Stacked piezoelectric element and method of fabrication thereof

A stacked piezoelectric element is produced by alternately stacking a piezoelectric layer and an inner electrode layer. The method includes producing a green sheetfor a base, forming a unit bodyhaving a narrow stacked partwhere a narrow piezoelectric material layerhaving an area smaller than the green sheetfor base and an electrode material layerhaving an area smaller than the green sheetfor base are stacked, the unit body being formed by disposing the narrow stacked parton the green sheetfor base; forming a stacked body having groove parts by stacking a plurality of the unit bodies, the groove part having the bottom being defined by the side face of the narrow stacked part; and firing the stacked body.

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Kariya, Japan

Tetsuji Itou