Kyocera Corporation

Tetsuji Hayasaki

Masahiro Nakahara

Masahiro Okumura

Yoshihiro Okawa

Disclosed is a corrosion resistant member comprising a sintered material having an &#x3b1;-AlOcrystal and an YAG (yttrium-aluminum-garnet) crystal. The corrosion resistant member contains metal elements, 70 to 98% by mass (inclusive) of Al in terms of AlOand 2 to 30% by mass of Y in terms of YO. The corrosion resistant member has a peak intensity ratio I/Iwithin the range from 0.94 to 1.98, preferably. 2.21 or higher, wherein Iand Irepresent peak intensities attributed to the (116) face and the (104) face, respectively, of an &#x3b1;-AlOcrystal as measured by X-ray diffractometry on its surface layer.

Corrosion-resistant member, treatment apparatus and sample treatment method using the member, and method for manufacture of corrosion-resistant member

A corrosion resistant member comprising a base material made of ceramics or a metal and at least one layer of corrosion resistant film formed on the surface of the former. At least one layer of the corrosion resistant film is a corrosion resistant film formed from a compound of the group 3 element as the main component and has specific characteristics so that it can improve film property.

Corrosion resistant member and method for manufacturing the same

A semiconductive ceramic contains a compound of MgO and SiO as a main component, and an iron oxide such as FeO, Fe O , and Fe O as an electric conductivity provider. According to necessity, the semiconductive ceramic further contains at least one of zinc oxide, niobium oxide, and chromium oxide as an electric conductivity provider. The semiconductive ceramic has a desired electric conductivity and a mechanical strength required for structural material, thus being usable in various applications.

Semiconductive ceramics and supporting member made of the same for supporting magnetic disk substrate

A semiconductive ceramic contains a compound of MgO and SiO.sub.2 as a main component, and an iron oxide such as FeO, Fe.sub.2 O.sub.3, and Fe.sub.3 O.sub.4 as an electric conductivity provider. According to necessity, the semiconductive ceramic further contains at least one of zinc oxide, niobium oxide, and chromium oxide as an electric conductivity provider. The semiconductive ceramic has a desired electric conductivity and a mechanical strength required for structural material, thus being usable in various applications.

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Kokubu, Japan

Tetsuji Hayasaki