Ngk Insulators, Inc.

Tetsuhisa Abe

Kazuhiro Nobori

Keita Yamana

Genichi Yokota

Hiromichi Kobayashi

Satoru Yamada

Tomonori Takahashi

Atsuo Kondo

Tomoyuki Fujii

Yutaka Unno

Osamu Sakai

Akira Hamajima

Takenori Ichigi

Ceramic heater

An AlN joined body includes a first AlN member and a second AlN member that are joined together. The content of yttria in the first AlN member is equal to or below the detection limit. The second AlN member contains yttria.

AlN joined body

A high-frequency power supply includes a shaft bonded to one surface of a plate serving as a gas distributor plate. The plate includes a radio-frequency electrode buried therein. The shaft has a through-hole through which a gas flows. The plate and the shaft are made of a ceramic material. The shaft has a double-tube structure including the inner tube and the outer tube . The interior space of the inner tube forms the through-hole. The plate is hermetically solid-state bonded to the inner tube and the outer tube. The shaft is bonded to the center of the plate.

Member for semiconductor manufacturing apparatus and method for manufacturing the same

Ceramic sintered bodies having a different thickness along a predetermined axial direction are manufactured in the following manner. At first, a ceramic formed body to be sintered having different thickness along the predetermined axial direction is accommodated in a hot press apparatus. An upper forming mold and a lower forming mold each having a forming surface corresponding to an upper surface and a lower surface of the ceramic formed body to be sintered are set. A pressure along the predetermined axial direction is applied to the ceramic formed body to be sintered via the upper forming mold and the lower forming mold while heating the ceramic formed body to be sintered to perform a hot press sintering thereof. A thickness of a ceramic sintered body is controlled in such a manner that a maximum thickness in the predetermined direction is not more than two times a minimum thickness in the predetermined direction.

Method of manufacturing ceramic sintered bodies

Ceramic sintered bodies having a different thickness along a predetermined axial direction are manufactured in the following manner. At first, a ceramic formed body to be sintered having different thickness along the predetermined axial direction is accommodated in a hot press apparatus. An upper forming mold and a lower forming mold each having a forming surface corresponding to an upper surface and a lower surface of the ceramic formed body to be sintered are set. A pressure along the predetermined axial direction is applied to the ceramic formed body to be sintered via the upper forming mold and the lower forming mold while heating the ceramic formed body to be sintered to perform a hot press sintering thereof. A thickness of a ceramic sintered body in such a manner that a maximum thickness in the predetermined direction is not two times larger or more than a minimum thickness in the predetermined direction.

A connected body including a gas separator 10 and metallic members 21 and 22, each of which has a partly oxidized surface to be reliably connected with the gas separator. The gas separator includes a ceramic substrate 11 and a gas separation membrane 12 to be coated onto substrate 11. The substrate 11 is porous so that a gas molecule can pass therethrough, and gas separation membrane 12 is connected with metallic members 21 and 22 by a glass 15 having a thermal expansion coefficient of 5.0-8.0.times.10.sup.-6 /.degree.C. Glass 15 contacts with metal supporters 21 and 22 with a contact angle of 90.degree. or less. The connected body of a gas separator and metallic supporters and an apparatus for separating hydrogen gas from a mixed gas display excellent durability and are free from leakage at the joints during the separation of hydrogen gas at high temperatures and under high pressure.

Connected body comprising a gas separator and a metal, and apparatus for

In a method of forming an assembly of an optical waveguide substrate and an optical fiber aligning substrate by adjoining an end face of a main body of the optical waveguide substrate and an end face of a main body of the optical fiber aligning substrate, a starting block formed by a flat rectangular plate is divided along a dividing surface which intersects perpendicularly to a side wall as well as a bottom wall of the starting block which are selected as a reference surface to obtain the main bodies of the optical waveguide substrate and optical fiber aligning substrate, optical waveguides are formed on the main body of the optical waveguide substrate by using the side wall and bottom wall as a positional reference, V-shaped guide grooves are formed in the main body of the optical fiber aligning substrate by using the side wall and bottom wall as a positional reference, and optical fibers are inserted into the guide grooves.

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Tokoname, Japan

Tetsuhisa Abe