Mitutoyo Corporation

Tetsuhiko Kubo

Hisayoshi Sakai

Susumu Yoshioka

Tadao Nakaya

Yoshio Saruki

Yukinari Nozawa

A main scalehas protrusive gratingof a thin film of e.g. Cr formed on a base member. The base memberand the Cr thin film constitute a reflecting face which is set to provide the sufficient quantity of received light on a light receiving side. The protrusive gratingcan be formed accurately by photo-etching the thin film.

Photoelectric encoder, scale therefor and method for manufacturing the same

An optical interferometric measuring instrument comprises a laser light source , an interferometer portion , a reflecting mirror , a bellows driving carriage , and a fixed portion . The bellows driving carriage moves together with a slider . A main bellows is disposed between the bellows driving carriage and the fixed portion . An auxiliary bellows is disposed between the reflecting mirror and the bellows driving carriage . An auxiliary bellows is disposed between the interferometer portion and the fixed portion . It is possible to avoid the variation of the laser wavelength ascribable to the change of the refractive index of air when the laser light passes through the air.

Optical interferometric measuring instrument and laser interference apparatus

An automatic inner diameter measuring apparatus which includes an inner diameter measuring gauge head having at least one contacting element capable of being inserted into bores of an object to be measured and moving in a radial direction of the bore. A stocker is provided which is capable of holding a plurality of inner diameter measuring gauge heads corresponding to different diameters. A three-dimensional moving instrument is provided for detachable coupling with the inner diameter measuring gauge head to facilitate a three-dimensional movement with reference to the object to be measured and the inner diameter measuring gauge. A drive device for the three-dimensional moving instrument is provided. A plurality of master ring gauges supported on a ring gauge support are provided to set an inner diameter measuring gauge head attached thereto to zero.

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Utsunomiya, Japan

Tetsuhiko Kubo