Mitsubishi Chemical Corporation

Tetsuharu Kajimoto

Yusuke Tsukada

Masayuki Tashiro

Yutaka Mikawa

Hideo Fujisawa

Satoru Nagao

Kenji Fujito

Kazunori Kamada

Takashi Fukada

A disc-like GaN substrate is a substrate produced by a tiling method and having an angel between the normal line and m-axis on the main surface of the substrate of 0 to 20&#xb0; inclusive and a diameter of 45 to 55 mm, to 4 or less. In a preferred embodiment, a disc-like GaN substrate has a first main surface and a second main surface that is opposite to the first main surface, and which has an angle between the normal line and m-axis on the first main surface of 0 to 20&#xb0; inclusive and a diameter of 45 mm or more. The disc-like GaN substrate comprises at least four crystalline regions each being exposed to both of the first main surface and the second main surface, wherein the four crystalline regions are arranged in line along the direction of the orthogonal projection of c-axis on the first main surface.

GaN substrate, method for producing GaN substrate, method for producing GaN crystal, and method for manufacturing semiconductor device

A disk-shaped GaN substrate has a diameter of 2 inches or more has a front surface tilted with a tilt angle of 45&#xb0; or more and 135&#xb0; or less relative to the (0001) plane in a tilt direction within a range of &#xb1;5&#xb0; around the &#x3c;10-10&#x3e; direction, and a back surface which is a main surface opposite to the front surface. The GaN substrate has a first point positioned in a direction perpendicular to the c-axis when viewed from the center thereof, on the side surface thereof. A single diffraction peak appears in an X-ray diffraction pattern obtained by &#x3b8; scan in which an X-ray (CuK&#x3b1;: wavelength: 0.1542 nm) is incident to the first point and the incident angle &#x3b8; of the incident X-ray is varied while the 2&#x3b8; angle of the diffracted X-ray is fixed to twice the Bragg angle of 28.99&#xb0; of the {11-20} plane.

GaN substrate

Growing community of inventors

Ushiku, Japan

Tetsuharu Kajimoto