Matsushita Electric Industrial Co., Ltd.

Other

Terumi Yanagi

Satoru Mitani

Toshio Fukazawa

Kumiko Wada

Tatsuaki Ishida

Keizo Miyata

Yoshihiro Tosaki

Hirokazu Uchiyama

Yuji Nagata

Nobuyuki Komura

Yoshihiro Tozaki

Two piezoelectric thin films each sandwiched between a main electrode layer and an opposite electrode layer are laminated in pairs so as to form a thin film piezoelectric element. An electrode leading area has a region in which the main electrode layer partially projects from the piezoelectric thin film, and another region in which only an insulating layer is formed on a part of the opposite electrode layer. At least one of a first opening formed through the insulating layer in the former region and a second opening formed through the insulating layer in the latter region is provided. A connection wiring for connecting to the opposite electrode layer or the main electrode layer and leading to the surface layer is formed via the opening.

Thin film piezoelectric element, method of manufacturing the same, and actuator

A recess for deaeration is formed in the surface of a resist film by using the photolithography technique, a photomask is allowed to come into contact with projections for close contact on both sides or around the recess for deaeration, and evacuation is performed via the recess for deaeration, thereby enhancing close contact between the photomask and the projections for close contact. With the configuration, a resist pattern having an accurate recess while preventing diffraction of light is formed.

Photomask, method of generating resist pattern, and method of fabricating master information carrier

In an integrated thin film magnetic head, a write pole or inductive head I.sub.h includes first and second magnetic cores magnetically coupled to form a magnetic circuit and a coil formed between the first and second magnetic cores. An MR element read pole or MR head MR.sub.h includes first and second yokes, an MR element and a bias conductor for applying a biasing magnetic field on the MR device, and the first magnetic core or the second magnetic core constitutes the second yoke.

Integrated thin film magnetic head

A thin film magnetic head device to be equipped on a magnetic recording and reproducing system can meet a plurality of recording formats and carry out stabilized recording/reproducing without depending on the running direction of the magnetic tape. There are combined either of at least two thin film magnetic heads for recording each having on a substrate a recording transducer for recording information on a magnetic tape or two thin film magnetic heads for reproducing each having a reproducing transducer for reading out information recorded on a magnetic tape or two thin magnetic heads for recording and reproducing .in which the recording transducer and the reproducing transducer exist together. According to the running direction of the magnetic tape, only the thin film magnetic head Which is situated at the downstream side in the running direction of the magnetic tape is activated to be always in an operating condition.

Thin film magnetic head device

Growing community of inventors

Osaka, Japan

Terumi Yanagi