L'air Liquide, Soci&#xe9;t&#xe9; Anonyme Pour L'etude Et L'exploitation Des Proc&#xe9;d&#xe9;s Georges Claude

Terumasa Koura

Kazutaka Yanagita

Kazuo Yokogi

Shingo Okubo

Kohei Tarutani

Takashi Kameoka

Toshiyuki Nakagawa

Sayaka Suzuki

Ikuo Suzuki

Fumikazu Nozawa

Masahiro Kimoto

Kazuma Suzuki

Taiji Hashimoto

Koji Matsumoto

Mikio Goto

Koji Ishida

Toru Sakai

Masaki Narazaki

Yukio Fukuda

Sayaka Ishizuka

Chika Shigaki

Supply system include a first vessel containing the precursor, a second vessel, a first gas conduit fluidically connecting the first vessel to the second vessel, wherein a pressure reduction device and a flow control device are fluidically mounted therein, a second gas conduit fluidically connecting the second vessel to a point of use, and a pressure gauge downstream the pressure reduction device for measuring a partial pressure of the precursor in the second vessel, wherein the partial pressure of the precursor in the second vessel is at a pressure lower than the saturated vapor pressure of the precursor at the temperature of the second vessel and higher than an inlet pressure requirement of the flow control device at the point of use. Methods for using the supply system are also disclosed.

Supply system for low volatility precursors

A cabinet for a solid material container comprises a main body having a top wall, a side wall, and a bottom wall; an entry/exit portion which is attached to a portion of the main body, for putting in and taking out the solid material container; an exhaust duct attached to a portion of the main body; a heating portion for heating the solid material container; a temperature measuring portion for measuring a temperature of the solid material container, or of the heating portion; and a cooling blower for blowing cooling air toward the solid material container.

Cabinet for solid material container

A neon recovering/purifying system including: a recovery vessel that is arranged on an exhaust gas route and stores exhaust gas, the exhaust gas route being branched and extending from a discharge line; a compressor that increases a pressure of the exhaust gas sent out from the recovery vessel, to a third pressure; an exhaust gas flow rate regulating unit that regulates a flow rate of the exhaust gas whose pressure has been increased by the compressor; a first impurity removing unit that removes a first impurity from the exhaust gas; a second impurity removing unit that removes a second impurity from the exhaust gas from which the first impurity has been removed; a pressure increasing vessel that stores purified gas that has been processed by the first impurity removing unit and the second impurity removing unit; a pressure reducing valve that reduces a pressure of the purified gas sent out from the pressure increasing vessel, to the first pressure; and a purified gas flow rate regulating unit that regulates a flow rate of the purified gas supplied to a supply line of a manufacturing system.

Neon recovering/purifying system and neon recovering/purifying method

An apparatus and method to remove water content in organic solvents characterized in that it comprises treatment tankto which organic solvent is introduced, solvent inlet sectionthat introduces the organic solvent, solvent outlet sectionfrom which the treated organic solvent is discharged, inert gas inlet sectionfrom which inert gas is introduced, treatment gas outlet sectionfrom which gas is discharged, cooling treatment tankin which the treatment gas is cooled and the gas and liquid are separated, treatment gas inlet sectionfrom which the treatment gas is introduced, recovered liquid outlet sectionfrom which the separated liquid organic solvent is discharged, and waste gas outlet sectionfrom which the separated gas is discharged, and that the water content in the organic solvent is removed by having the inert gas flow over the entire liquid surface of the organic solvent inside treatment tank

Apparatus and method for removing water content from organic solvents

To provide a simple highly-pure Xe retrieval method and device with high retrieval efficiency by functionally removing such elements as water, CO2 and FCs from waste gases from semiconductor production processes, such as the plasma etching, that contain low-concentration Xe. For samples containing xenon and fluorocarbon, this invention is characterized by having at least first adsorption means (A1) filled with synthetic zeolite with pore size of 4A or smaller and aluminum oxide, arranged serially, gas separation means (A2) composed of silicone or polyethylene hollow fiber gas separation membrane modules 4, second adsorption means (A3) filled with either activated carbon, synthetic zeolite with pore size of 5A or larger, molecular sieving carbon with pore size of 5A or larger, or a combination of these, and reaction means (A4) filled with calcium compounds as reactant.

Xenon retrieval system and retrieval device

Growing community of inventors

Tsukuba, Japan

Terumasa Koura