Luxtron Corporation

Advanced Energy Industries, Inc.

Terry M Stapleton

John P Gotthold

Robert Champetier

Hung Dang

Jason Errett

Anh Ngoc Hoang

John Leonard Shaver

Surinder S Sandhu

A fiber optic temperature probe is disclosed. The fiber optic temperature probe includes a probe shaft containing an optical fiber. An optical temperature sensor element is coupled to the probe shaft and configured to be excited by light from the optical fiber and emit light back to the optical fiber. A thermally conductive plate is coupled to the probe shaft and interfaces with the optical temperature sensor element. Baffling extends from the probe shaft and surrounds the edges of the thermally conductive plate.

Fiber optic temperature probe

A plasma processing chamber optical temperature sensor is disclosed. The plasma processing chamber optical temperature sensor includes a light source, a light detector, and a means for transmitting light through a wall of a plasma processing chamber. An optical temperature sensing element is thermally coupled to a plasma processing chamber component within the plasma processing chamber. The optical temperature sensing element includes a monolithic crystalline phosphor element configured to be excited by light from the light source and to emit light back to the light detector indicative of a temperature of the monolithic crystalline phosphor element.

Optical temperature sensor with monolithic crystalline phosphor

A luminescent temperature sensor comprising (i) an object having a recess, (ii) a layer of luminescent material disposed in the recess, wherein the luminescent material emits electromagnetic radiation having a detectable optical characteristic that is functionally dependent on the temperature of the object, and (iii) a light waveguide in optical communication with the layer of luminescent material, is provided. A test device for measuring a temperature in a processing step comprising (i) an object having a surface and having a recess in the surface of the object, (ii) a layer of luminescent material disposed in the recess, wherein the luminescent material emits electromagnetic radiation having a detectable optical characteristic that is functionally dependent on the temperature of the object in response to a source of excitation radiation, and (iii) an optical window that seals said layer of luminescent material in the recess in the surface of the object, is provided.

In situ optical surface temperature measuring techniques and devices

A temperature sensor that has a thermally conducting contact with a surface that emits electromagnetic radiation in proportion to the temperature of the contact is disclosed. The sensor has a resilient member attached to the contact and configured to extend the contact toward the object to be measured. A first light waveguide is attached to the contact and is configured to transmit the electromagnetic radiation from the contact. The sensor has a guide with a bore formed therein that the first waveguide is insertable into. When the contact is moved, the first waveguide moves within the bore. A second waveguide is attached to the guide such that a variable gap is formed between the ends of the first waveguide and the second waveguide. Electromagnetic energy from the first waveguide traverses the gap and can be transmitted by the second waveguide. The guide allows the first waveguide to move with the contact in order to ensure that the contact is fully engaged with the surface of the object.

A temperature sensor utilizing optical temperature measuring techniques is constructed to make firm contact with a surface whose temperature is being measured, an example application being the monitoring of semiconductor wafers or flat panel displays while being processed. A cap is mounted near but spaced apart from an end of a lightwave guide, with a resilient element that applies force of the cap against a surface whose temperature is being measured as the cap is urged toward the optical fiber end. An optical temperature sensing element, such as luminescent material or a surface of known emissivity, is carried within the cap. A bellows with a closed end conveniently serves as both the cap and the resilient element. An alternative temperature measuring device installs an optical temperature sensing material within a test substrate behind an optical window, and then views the sensing material through the window.

Growing community of inventors

San Jose, CA, United States of America

Terry M Stapleton