Chipworks Inc.

Terry Ludlow

David F Skoll

Julia Elvidge

Michael William Phaneuf

Pierrette M Breton

Ray Haythornthwaite

Dick James

Bryan Socransky

Louise Weaver

Pierrette Breton

A design analysis workstation for performing design analysis of integrated circuits provides facilities for extracting design and layout information from digital image-mosaics captured during deconstruction of an integrated circuit. The design analysis workstation enables propagation of signal information from an annotation object having a signal property to at least one connected annotation object in order to point to errors in the design analysis.

Design analysis workstation for analyzing integrated circuits

A design analysis workstation for performing design analysis of integrated circuits provides facilities for extracting design and layout information from digital image-mosaics captured during deconstruction of an integrated circuit. Each image-mosaic is displayed in at least one mosaic-view as a background image that is overlaid with at least one annotation overlay. An engineer analyst creates annotation objects on the annotation overlay based on information inferred concurrently from one or more image-mosaics. Concurrent display of a plurality of image-mosaics facilitates the understanding of interrelations between components on different layers. The design analysis workstation displays a plurality of cursors in respective views of mosaic-images, the cursors having lock-step motion to facilitate comprehension of the alignment of features on different concurrently displayed image-mosaics. The design analysis workstation provides facilities for performing operations on created annotation objects including grouping, cell definition, signal carrier creation, contact creation, signal propagation, net-list generation, etc. The advantages include annotation of image-mosaics using information derived from a plurality of concurrently displayed mosaic-views to facilitate tracing of interconnected busses and an understanding of interrelations between components.

A method of imaging an integrated circuit using a focused ion beam system is presented. According to the method an integrated circuit is imaged in plan-view using a focused ion beam system. Circuit information is then extracted absent processing. In another embodiment, a method and system for imaging an entire IC automatically without removing the IC from the imaging system and requiring minimal operator intervention is presented. The method employs a focused ion beam system to image an exposed layer of an integrated circuit and then to etch a portion of the exposed layer in situ. Imaging and etching are repeated until substantially the entire integrated circuit is imaged. A processor is used to assemble the layers into a three-dimensional topography of the integrated circuit. Because of known relationships between layers, the mosaicing is facilitated and the final topography is more reliable than those produced by currently known computer implemented methods.

Automatic focused ion beam imaging system and method

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Ottawa, Canada

Terry Ludlow